Tsukasa Hirayama

Person

Tosu-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid treatment apparatus
- Patent number 11,309,194
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Koji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,087,992
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Tsukasa Hirayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,062,922
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Takashi Nagai
- G08 - SIGNALLING
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,643,874
- Issue date May 5, 2020
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus with cleaning jig
- Patent number 9,721,813
- Issue date Aug 1, 2017
- Tokyo Electron Limited
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 9,321,085
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Teruomi Minami
- B08 - CLEANING
Information Patent Grant
Substrate drying processing apparatus, method, and program recordin...
- Patent number 7,581,335
- Issue date Sep 1, 2009
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240038501
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Akira NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220310361
- Publication date Sep 29, 2022
- TOKYO ELECTRON LIMITED
- Tsukasa HIRAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210335621
- Publication date Oct 28, 2021
- TOKYO ELECTRON LIMITED
- Tsukasa Hirayama
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200251343
- Publication date Aug 6, 2020
- TOKYO ELECTRON LIMITED
- Tsukasa Hirayama
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20180247841
- Publication date Aug 30, 2018
- TOKYO ELECTRON LIMITED
- Takashi Nagai
- G08 - SIGNALLING
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS
- Publication number 20180218924
- Publication date Aug 2, 2018
- TOKYO ELECTRON LIMITED
- Koji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20170358470
- Publication date Dec 14, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, CLEANING JIG, AND CLEANING METHOD
- Publication number 20140014134
- Publication date Jan 16, 2014
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20130133695
- Publication date May 30, 2013
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- B08 - CLEANING
Information Patent Application
Drying apparatus, drying method, substrate processing apparatus, su...
- Publication number 20070113423
- Publication date May 24, 2007
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Tsukasa Hirayama

Person

Patents Grantslast 30 patents

Substrate liquid treatment apparatus

Substrate processing method and substrate processing apparatus

Substrate liquid processing apparatus

Substrate liquid processing apparatus, substrate liquid processing...

Liquid processing apparatus with cleaning jig

Substrate processing method, storage medium storing computer progra...

Substrate drying processing apparatus, method, and program recordin...

Patents Applicationslast 30 patents

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE LIQUID TREATMENT APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

LIQUID PROCESSING APPARATUS, CLEANING JIG, AND CLEANING METHOD

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...

Drying apparatus, drying method, substrate processing apparatus, su...