Tsukasa Hori

Person

Hiratsuka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Target supply device, extreme ultraviolet light generation apparatu...
- Patent number 11,363,706
- Issue date Jun 14, 2022
- Gigaphoton Inc.
- Yutaka Shiraishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, extreme ultraviolet light generating apparatu...
- Patent number 11,360,391
- Issue date Jun 14, 2022
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, target supply method, and electronic device m...
- Patent number 11,320,740
- Issue date May 3, 2022
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target supply device, target supply method, and electronic device m...
- Patent number 11,310,899
- Issue date Apr 19, 2022
- Gigaphoton Inc.
- Yutaka Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser apparatus and EUV light generation system
- Patent number 11,043,784
- Issue date Jun 22, 2021
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target supply device, target material refining method, recording me...
- Patent number 10,629,414
- Issue date Apr 21, 2020
- Gigaphoton Inc.
- Fumio Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber device and extreme ultraviolet light generating device
- Patent number 10,631,393
- Issue date Apr 21, 2020
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme UV light generation device
- Patent number 10,512,149
- Issue date Dec 17, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 10,506,697
- Issue date Dec 10, 2019
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,306,743
- Issue date May 28, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,251,255
- Issue date Apr 2, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 10,251,253
- Issue date Apr 2, 2019
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, processing device and processing method therefor
- Patent number 10,237,961
- Issue date Mar 19, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Filter and target supply apparatus
- Patent number 10,143,074
- Issue date Nov 27, 2018
- Gigaphoton Inc.
- Tomohide Ichinose
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Target supply device, processing device and processing method thefefor
- Patent number 10,136,509
- Issue date Nov 20, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,117,317
- Issue date Oct 30, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber device, target generation method, and extreme ultraviolet l...
- Patent number 10,028,365
- Issue date Jul 17, 2018
- Gigaphoton Inc.
- Takanobu Ishihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme UV light generation device and target recovery apparatus
- Patent number 10,028,366
- Issue date Jul 17, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,894,744
- Issue date Feb 13, 2018
- Gigaphoton Inc.
- Fumio Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target producing apparatus
- Patent number 9,883,574
- Issue date Jan 30, 2018
- Gigaphoton Inc.
- Fumio Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,877,378
- Issue date Jan 23, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target supply apparatus, extreme ultraviolet light generating appar...
- Patent number 9,860,967
- Issue date Jan 2, 2018
- Gigaphoton Inc.
- Hirokazu Hosoda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,854,658
- Issue date Dec 26, 2017
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus including target dro...
- Patent number 9,699,877
- Issue date Jul 4, 2017
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,497,842
- Issue date Nov 15, 2016
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,265,136
- Issue date Feb 16, 2016
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,167,678
- Issue date Oct 20, 2015
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,113,540
- Issue date Aug 18, 2015
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation by polarized laser beam
- Patent number 9,055,657
- Issue date Jun 9, 2015
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, extreme ultraviolet light generation apparatu...
- Patent number 8,742,380
- Issue date Jun 3, 2014
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
DISCHARGE ELECTRODE, METHOD FOR MANUFACTURING ANODE, AND METHOD FOR...
- Publication number 20230275386
- Publication date Aug 31, 2023
- Gigaphoton Inc.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
- Publication number 20220015218
- Publication date Jan 13, 2022
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...
- Publication number 20210410261
- Publication date Dec 30, 2021
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...
- Publication number 20210364927
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
- Publication number 20210333718
- Publication date Oct 28, 2021
- Gigaphoton Inc.
- Yuichi NISHIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATING APPARATU...
- Publication number 20200341383
- Publication date Oct 29, 2020
- Gigaphoton Inc.
- Fumio IWAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER APPARATUS AND EUV LIGHT GENERATION SYSTEM
- Publication number 20200044407
- Publication date Feb 6, 2020
- Gigaphoton Inc.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20200033739
- Publication date Jan 30, 2020
- Gigaphoton Inc.
- Tsukasa HORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...
- Publication number 20190237303
- Publication date Aug 1, 2019
- Gigaphoton Inc.
- Fumio IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20190174614
- Publication date Jun 6, 2019
- Gigaphoton Inc.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190141826
- Publication date May 9, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME UV LIGHT GENERATION DEVICE
- Publication number 20190116655
- Publication date Apr 18, 2019
- Gigaphoton Inc.
- Tsukasa HORI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CHAMBER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
- Publication number 20190075642
- Publication date Mar 7, 2019
- Gigaphoton Inc.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE, PROCESSING DEVICE AND PROCESSING METHOD THEREFOR
- Publication number 20190045614
- Publication date Feb 7, 2019
- Gigaphoton Inc.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190037677
- Publication date Jan 31, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20180160519
- Publication date Jun 7, 2018
- Gigaphoton Inc.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20180110116
- Publication date Apr 19, 2018
- GIGAPHOTON INC.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET L...
- Publication number 20180007770
- Publication date Jan 4, 2018
- Gigaphoton Inc.
- Takanobu ISHIHARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME UV LIGHT GENERATION DEVICE AND TARGET RECOVERY APPARATUS
- Publication number 20170307979
- Publication date Oct 26, 2017
- Gigaphoton Inc.
- Tsukasa HORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE, PROCESSING DEVICE AND PROCESSING METHOD THEFEFOR
- Publication number 20170280543
- Publication date Sep 28, 2017
- Gigaphoton Inc.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
VIBRATOR UNIT AND TARGET SUPPLY DEVICE
- Publication number 20170215266
- Publication date Jul 27, 2017
- Gigaphoton Inc.
- Toshiyuki HIRASHITA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...
- Publication number 20170053780
- Publication date Feb 23, 2017
- Gigaphoton Inc.
- Fumio IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20170019983
- Publication date Jan 19, 2017
- GIGAPHOTON INC.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET SUPPLY APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATING APPAR...
- Publication number 20160323986
- Publication date Nov 3, 2016
- Gigaphoton Inc.
- Hirokazu HOSODA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET PRODUCING APPARATUS
- Publication number 20160270199
- Publication date Sep 15, 2016
- Gigaphoton Inc.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160255709
- Publication date Sep 1, 2016
- GIGAPHOTON INC.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FILTER AND TARGET SUPPLY APPARATUS
- Publication number 20160227637
- Publication date Aug 4, 2016
- Gigaphoton Inc.
- Tomohide ICHINOSE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...
- Publication number 20160227638
- Publication date Aug 4, 2016
- Gigaphoton Inc.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160192470
- Publication date Jun 30, 2016
- GIGAPHOTON INC.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20160128172
- Publication date May 5, 2016
- Gigaphoton Inc.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS

Tsukasa Hori

Person

Patents Grantslast 30 patents

Target supply device, extreme ultraviolet light generation apparatu...

Target supply device, extreme ultraviolet light generating apparatu...

Target supply device, target supply method, and electronic device m...

Target supply device, target supply method, and electronic device m...

Laser apparatus and EUV light generation system

Target supply device, target material refining method, recording me...

Chamber device and extreme ultraviolet light generating device

Extreme UV light generation device

Extreme ultraviolet light generation device

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light

Extreme ultraviolet light generation device

Target supply device, processing device and processing method therefor

Filter and target supply apparatus

Target supply device, processing device and processing method thefefor

System and method for generating extreme ultraviolet light

Chamber device, target generation method, and extreme ultraviolet l...

Extreme UV light generation device and target recovery apparatus

Extreme ultraviolet light generation apparatus

Target producing apparatus

System and method for generating extreme ultraviolet light

Target supply apparatus, extreme ultraviolet light generating appar...

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation apparatus including target dro...

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light

Extreme ultraviolet light generation by polarized laser beam

Target supply device, extreme ultraviolet light generation apparatu...

Patents Applicationslast 30 patents

DISCHARGE ELECTRODE, METHOD FOR MANUFACTURING ANODE, AND METHOD FOR...

TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...

TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...

TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...

TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATING APPARATU...

LASER APPARATUS AND EUV LIGHT GENERATION SYSTEM

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

EXTREME UV LIGHT GENERATION DEVICE

CHAMBER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE

TARGET SUPPLY DEVICE, PROCESSING DEVICE AND PROCESSING METHOD THEREFOR

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET L...

EXTREME UV LIGHT GENERATION DEVICE AND TARGET RECOVERY APPARATUS

TARGET SUPPLY DEVICE, PROCESSING DEVICE AND PROCESSING METHOD THEFEFOR

VIBRATOR UNIT AND TARGET SUPPLY DEVICE

TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

TARGET SUPPLY APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATING APPAR...

TARGET PRODUCING APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

FILTER AND TARGET SUPPLY APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT