Tsukasa Iida

Follow

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and recording medium for changing at...
- Patent number 11,521,880
- Issue date Dec 6, 2022
- Kokusai Electric Corporation
- Satoru Takahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, recording medium and method of manu...
- Patent number 9,595,460
- Issue date Mar 14, 2017
- Hitachi Kokusai Electric Inc.
- Tsukasa Iida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,482,426
- Issue date Jul 9, 2013
- Hitachi Kokusai Electric Inc.
- Tsukasa Iida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, semiconductor device manufacturing...
- Patent number 8,417,394
- Issue date Apr 9, 2013
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,808,396
- Issue date Oct 5, 2010
- Hitachi Kokusai Electric, Inc.
- Tsukasa Iida
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20200035533
- Publication date Jan 30, 2020
- Kokusai Electric Corporation
- Satoru TAKAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM AND METHOD OF MANU...
- Publication number 20160307783
- Publication date Oct 20, 2016
- Hitachi Kokusai Electric Inc.
- Tsukasa IIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND METHO...
- Publication number 20130102159
- Publication date Apr 25, 2013
- Hitachi Kokusai Electric Inc.
- Hiroshi KOTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20100124726
- Publication date May 20, 2010
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20090072990
- Publication date Mar 19, 2009
- Hitachi Kokusai Electric Inc.
- Tsukasa Iida
- G05 - CONTROLLING REGULATING