Tsukasa KAMAKURA

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning member in process container, method of manufactu...
- Patent number 12,053,805
- Issue date Aug 6, 2024
- Kokusai Electric Corporation
- Koei Kuribayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,967,534
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Tsukasa Kamakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, recording medium, and...
- Patent number 11,848,201
- Issue date Dec 19, 2023
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, substrate processing apparatus, rec...
- Patent number 11,810,781
- Issue date Nov 7, 2023
- Kokusai Electric Corporation
- Kiyohisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate, substrate processing apparatus, rec...
- Patent number 11,764,056
- Issue date Sep 19, 2023
- Kokusai Electric Corporation
- Kiyohisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,728,162
- Issue date Aug 15, 2023
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system
- Patent number 11,726,456
- Issue date Aug 15, 2023
- Kokusai Electric Corporation
- Masanori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, recording medium, and...
- Patent number 11,251,039
- Issue date Feb 15, 2022
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, recording medium, and...
- Patent number 11,251,038
- Issue date Feb 15, 2022
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 10,978,310
- Issue date Apr 13, 2021
- Kokusai Electric Corporation
- Tsukasa Kamakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,847,392
- Issue date Nov 24, 2020
- Kokusai Electric Corporation
- Tsukasa Kamakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,808,318
- Issue date Oct 20, 2020
- Kokusai Electric Corporation
- Takeo Hanashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,784,116
- Issue date Sep 22, 2020
- Kokusai Electric Corporation
- Tsukasa Kamakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,714,316
- Issue date Jul 14, 2020
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system
- Patent number 10,671,056
- Issue date Jun 2, 2020
- Kokusai Electric Corporation
- Masanori Nakayama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,655,218
- Issue date May 19, 2020
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,388,512
- Issue date Aug 20, 2019
- Kokusai Electric Corporation
- Takeo Hanashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,211,110
- Issue date Feb 19, 2019
- Hitachi Kokusai Electric Inc.
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,121,650
- Issue date Nov 6, 2018
- Hitachi Kokusai Electric, Inc.
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,953,830
- Issue date Apr 24, 2018
- Hitachi Kokusai Electric Inc.
- Takuro Ushida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,916,976
- Issue date Mar 13, 2018
- Hitachi Kokusai Electric Inc.
- Takuro Ushida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,831,082
- Issue date Nov 28, 2017
- Hitachi Kokusai Electric Inc.
- Satoshi Shimamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,831,083
- Issue date Nov 28, 2017
- Hitachi Kokusai Electric Inc.
- Daigo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,732,421
- Issue date Aug 15, 2017
- Hitachi Kokusai Electric Inc.
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,673,043
- Issue date Jun 6, 2017
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,640,387
- Issue date May 2, 2017
- Hitachi Kokusai Electric Inc.
- Ryuji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,520,282
- Issue date Dec 13, 2016
- Hitachi Kokusai Electric Inc.
- Katsuyoshi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 9,472,391
- Issue date Oct 18, 2016
- Hitachi Kokusai Electric Inc.
- Satoshi Shimamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,455,137
- Issue date Sep 27, 2016
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,449,813
- Issue date Sep 20, 2016
- Hitachi Kokusai Electric Inc.
- Atsushi Sano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, METHOD...
- Publication number 20250014924
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20250014930
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...
- Publication number 20240359218
- Publication date Oct 31, 2024
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230369043
- Publication date Nov 16, 2023
- Kokusai Electric Corporation
- Kiyohisa ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220301851
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Takafumi NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220122833
- Publication date Apr 21, 2022
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20210398864
- Publication date Dec 23, 2021
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20210305044
- Publication date Sep 30, 2021
- Kokusai Electric Corporation
- Kiyohisa ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20210217608
- Publication date Jul 15, 2021
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20200257269
- Publication date Aug 13, 2020
- Kokusai Electric Corporation
- Masanori NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200243325
- Publication date Jul 30, 2020
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200243324
- Publication date Jul 30, 2020
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200098603
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-Transitory Com...
- Publication number 20190295854
- Publication date Sep 26, 2019
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...
- Publication number 20190255576
- Publication date Aug 22, 2019
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190244790
- Publication date Aug 8, 2019
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20190025799
- Publication date Jan 24, 2019
- Hitachi Kokusai Electric Inc.
- Masanori NAKAYAMA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20190017169
- Publication date Jan 17, 2019
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20180363138
- Publication date Dec 20, 2018
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20180204732
- Publication date Jul 19, 2018
- Hitachi Kokusai Electric Inc.
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20180151347
- Publication date May 31, 2018
- Hitachi Kokusai Electric Inc.
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20170029945
- Publication date Feb 2, 2017
- Hitachi Kokusai Electric Inc.
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20170018419
- Publication date Jan 19, 2017
- Hitachi Kokusai Electric Inc.
- Takuro USHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20170004961
- Publication date Jan 5, 2017
- Hitachi Kokusai Electric Inc.
- Takuro USHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160322212
- Publication date Nov 3, 2016
- Hitachi Kokusai Electric Inc.
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160233085
- Publication date Aug 11, 2016
- Hitachi Kokusai Electric Inc.
- Daigo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160211135
- Publication date Jul 21, 2016
- Hitachi Kokusai Electric Inc.
- Takaaki NODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20160155634
- Publication date Jun 2, 2016
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160064219
- Publication date Mar 3, 2016
- Hitachi Kokusai Electric Inc.
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160060755
- Publication date Mar 3, 2016
- Hitachi Kokusai Electric Inc.
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tsukasa KAMAKURA

Person

Patents Grantslast 30 patents

Method of cleaning member in process container, method of manufactu...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, recording medium, and...

Method of processing substrate, substrate processing apparatus, rec...

Method of processing substrate, substrate processing apparatus, rec...

Method of manufacturing semiconductor device, substrate processing...

Substrate processing system

Method of manufacturing semiconductor device, recording medium, and...

Method of manufacturing semiconductor device, recording medium, and...

Method of manufacturing semiconductor device and non-transitory com...

Method of manufacturing semiconductor device

Substrate processing apparatus, method of manufacturing semiconduct...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Substrate processing system

Substrate processing apparatus, method of manufacturing semiconduct...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Semiconductor device manufacturing method

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, substrate processing...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, METHOD...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Method of Manufacturing Semiconductor Device

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING SYSTEM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method of Manufacturing Semiconductor Device and Non-Transitory Com...

METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Method of Manufacturing Semiconductor Device, Substrate Processing...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS