Tsukasa Makino

Follow

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, substrate processing method, sealed co...
- Patent number 7,925,370
- Issue date Apr 12, 2011
- Tokyo Electron Limited
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, sealed co...
- Patent number 7,462,011
- Issue date Dec 9, 2008
- Tokyo Electron Limited
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, SEALED CO...
- Publication number 20090043419
- Publication date Feb 12, 2009
- TOKYO ELECTRON LIMITED
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing system, substrate processing method, sealed co...
- Publication number 20060105473
- Publication date May 18, 2006
- TOKYO ELECTRON LIMITED
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS