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Tsukasa Matsuda
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Seongnam, KR
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last 30 patents
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Patent Grant
Sequential tantalum-nitride deposition
Patent number
7,642,201
Issue date
Jan 5, 2010
Tokyo Electron Limited
Frank M. Cerio, Jr.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
SEQUENTIAL TANTALUM-NITRIDE DEPOSITION
Publication number
20090191721
Publication date
Jul 30, 2009
TOKYO ELECTRON LIMITED
Frank M. Cerio, JR.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...