Tsukasa Matsuda

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Seongnam, KR

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Patents Grantslast 30 patents

Information Patent Grant
Sequential tantalum-nitride deposition
- Patent number 7,642,201
- Issue date Jan 5, 2010
- Tokyo Electron Limited
- Frank M. Cerio, Jr.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEQUENTIAL TANTALUM-NITRIDE DEPOSITION
- Publication number 20090191721
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Frank M. Cerio, JR.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...