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Tsukasa Sugawara
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Distributed control system and communication control method therefor
Patent number
11,343,119
Issue date
May 24, 2022
HITACHI HIGH-TECH CORPORATION
Kazushi Yamashina
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Stage device and charged particle beam apparatus using the stage de...
Patent number
9,627,173
Issue date
Apr 18, 2017
Hitachi High-Technologies Corporation
Hironori Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage control method, a stage control system, and a semiconductor m...
Patent number
7,130,026
Issue date
Oct 31, 2006
Hitachi High-Technologies Corporation
Tsukasa Sugawara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Circuit board module, circuit board chassis and electromagnetic shi...
Patent number
7,102,897
Issue date
Sep 5, 2006
Hitachi High-Technologies Corporation
Tsukasa Sugawara
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Distributed Control System and Communication Control Method Therefor
Publication number
20210111924
Publication date
Apr 15, 2021
Hitachi High-Tech Corporation
Kazushi YAMASHINA
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Stage Device and Charged Particle Beam Apparatus Using the Stage De...
Publication number
20150248991
Publication date
Sep 3, 2015
Hironori OGAWA
G01 - MEASURING TESTING
Information
Patent Application
Stage control method, a stage control system, and a semiconductor m...
Publication number
20050174554
Publication date
Aug 11, 2005
Hitachi High-Technologies Corporation
Tsukasa Sugawara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Circuit board module, circuit board chassis and electromagnetic shi...
Publication number
20040228102
Publication date
Nov 18, 2004
Tsukasa Sugawara
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR