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Tsukasa Yonekawa
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Yamanashi, JP
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last 30 patents
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Patent Grant
Method of fabricating semiconductor device
Patent number
6,933,249
Issue date
Aug 23, 2005
Tokyo Electron Limited
Shin Yokoyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Method of fabricating semiconductor device
Publication number
20040152339
Publication date
Aug 5, 2004
Shin Yokoyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...