Tsukasa Yonekawa

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 7,625,604
- Issue date Dec 1, 2009
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of oxidizing member to be treated
- Patent number 7,304,002
- Issue date Dec 4, 2007
- Tokyo Electron Limited
- Tatsuo Nishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing semiconductor substrate
- Patent number 6,972,235
- Issue date Dec 6, 2005
- Tokyo Electron Limited
- Tsukasa Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUPERCRITICAL DRYING DEVICE AND SUPERCRITICAL DRYING METHOD
- Publication number 20140130367
- Publication date May 15, 2014
- DAI NIPPON PRINTING CO., LTD.
- Tsukasa Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of oxidizing member to be treated
- Publication number 20060094248
- Publication date May 4, 2006
- Tatsuo Nishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment method and heat treament apparatus
- Publication number 20050201894
- Publication date Sep 15, 2005
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for processing semiconductor substrate
- Publication number 20050003629
- Publication date Jan 6, 2005
- Tsukasa Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS