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Fujisawa-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for regenerating ion exchanger
Patent number
8,133,380
Issue date
Mar 13, 2012
Ebara Corporation
Takayuki Saito
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Electrolytic processing apparatus and electrolytic processing method
Patent number
7,638,030
Issue date
Dec 29, 2009
Ebara Corporation
Osamu Nabeya
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Composite processing apparatus and method
Patent number
7,563,356
Issue date
Jul 21, 2009
Ebara Corporation
Osamu Nabeya
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electrolytic processing apparatus and electrolytic processing method
Patent number
7,527,723
Issue date
May 5, 2009
Ebara Corporation
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,476,290
Issue date
Jan 13, 2009
Ebara Corporation
Takayuki Saito
B08 - CLEANING
Information
Patent Grant
Method and device for regenerating ion exchanger, and electrolytic...
Patent number
7,427,345
Issue date
Sep 23, 2008
Ebara Corporation
Takayuki Saito
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Substrate processing apparatus and method
Patent number
7,208,076
Issue date
Apr 24, 2007
Ebara Corporation
Itsuki Kobata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrolytic processing device and substrate processing apparatus
Patent number
7,101,465
Issue date
Sep 5, 2006
Ebara Corporation
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for the preparation of clean gases
Patent number
7,029,518
Issue date
Apr 18, 2006
Ebara Research Co., Ltd.
Toshiaki Fujii
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Substrate processing apparatus
Patent number
6,932,884
Issue date
Aug 23, 2005
Ebara Corporation
Takayuki Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for the preparation of clean gases
Patent number
6,911,064
Issue date
Jun 28, 2005
Ebara Research Co., Ltd.
Toshiaki Fujii
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Method and apparatus for the preparation of clean gases
Patent number
6,733,570
Issue date
May 11, 2004
Ebara Research Co., Ltd.
Toshiaki Fujii
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Method and apparatus for the preparation of clean gases
Patent number
6,340,381
Issue date
Jan 22, 2002
Ebara Research Co., Ltd.
Toshiaki Fujii
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Method and apparatus for the preparation of clean gases
Patent number
5,922,105
Issue date
Jul 13, 1999
Ebara Research Co., Ltd.
Toshiaki Fujii
F24 - HEATING RANGES VENTILATING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100325913
Publication date
Dec 30, 2010
Xinming WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20090090397
Publication date
Apr 9, 2009
Takayuki Saito
B08 - CLEANING
Information
Patent Application
Electrochemical mechanical polishing method and electrochemical mec...
Publication number
20090078583
Publication date
Mar 26, 2009
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and device for regenerating ion exchanger, and electrolytic...
Publication number
20080314763
Publication date
Dec 25, 2008
Takayuki Saito
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrochemical mechanical polishing apparatus conditioning method,...
Publication number
20080188162
Publication date
Aug 7, 2008
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Pre-polishing treatment solution for interconnect substrate, polish...
Publication number
20080171440
Publication date
Jul 17, 2008
Akira Kodera
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Flattening Method and Flattening Apparatus
Publication number
20080121529
Publication date
May 29, 2008
Yasushi Tohma
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic liquid for electrolytic polishing and electrolytic pol...
Publication number
20080067077
Publication date
Mar 20, 2008
Akira Kodera
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrolytic processing apparatus and electrolytic processing method
Publication number
20070187257
Publication date
Aug 16, 2007
EBARA CORPORATION
Ikutaro Noji
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate processing apparatus and method
Publication number
20070187259
Publication date
Aug 16, 2007
Itsuki Kobata
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Composite machining device and method
Publication number
20060175191
Publication date
Aug 10, 2006
Osamu Nabeya
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrochemical machining device and electrochemical machining method
Publication number
20060144711
Publication date
Jul 6, 2006
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate processing apparatus
Publication number
20050242064
Publication date
Nov 3, 2005
Takayuki Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for the preparation of clean gases
Publication number
20050178267
Publication date
Aug 18, 2005
EBARA RESEARCH CO., LTD.
Toshiaki Fujii
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Electrolytic processing apparatus and electrolytic processing method
Publication number
20050155868
Publication date
Jul 21, 2005
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20050092351
Publication date
May 5, 2005
Takayuki Saito
B08 - CLEANING
Information
Patent Application
Electrolytic processing apparatus and method
Publication number
20040256237
Publication date
Dec 23, 2004
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate processing appartus and method
Publication number
20040231989
Publication date
Nov 25, 2004
Itsuki Kobata
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method and apparatus for the preparation of clean gases
Publication number
20040149128
Publication date
Aug 5, 2004
EBARA RESEARCH CO., LTD.
Toshiaki Fujii
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Electrolytic processing apparatus and electrolytic processing method
Publication number
20040129569
Publication date
Jul 8, 2004
Osamu Nabeya
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method and device for regenerating ion exchanger, and electrolytic...
Publication number
20040112761
Publication date
Jun 17, 2004
Takayuki Saito
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic processing device and substrate processing apparatus
Publication number
20030136668
Publication date
Jul 24, 2003
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrolytic processing device and substrate processing apparatus
Publication number
20030132103
Publication date
Jul 17, 2003
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR THE PREPARATION OF CLEAN GASES
Publication number
20030089231
Publication date
May 15, 2003
TOSHIAKI FUJII
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Substrate processing apparatus
Publication number
20030041968
Publication date
Mar 6, 2003
Takayuki Saito
H01 - BASIC ELECTRIC ELEMENTS