Tsun-Cheng Tang

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Chia-i, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for defect inspection
- Patent number 11,953,448
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tsun-Cheng Tang
- G01 - MEASURING TESTING
Information Patent Grant
Method of fabricating a photomask and method of inspecting a photomask
- Patent number 11,567,400
- Issue date Jan 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsun-Cheng Tang
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method of a photomask and an inspection system
- Patent number 11,048,163
- Issue date Jun 29, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsun-Cheng Tang
- G01 - MEASURING TESTING
Information Patent Grant
Utilizing vacuum ultraviolet (VUV) exposure to remove halos of carb...
- Patent number 6,627,363
- Issue date Sep 30, 2003
- Taiwan Semiconductor Manufacturing Company
- Vincent Wen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY SYSTEM AND METHODS
- Publication number 20240402623
- Publication date Dec 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Pin CHENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FABRICATING A PHOTOMASK AND METHOD OF INSPECTING A PHOTOMASK
- Publication number 20210278760
- Publication date Sep 9, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tsun-Cheng Tang
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DEFECT INSPECTION
- Publication number 20210096086
- Publication date Apr 1, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- TSUN-CHENG TANG
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD OF A PHOTOMASK AND AN INSPECTION SYSTEM
- Publication number 20190137869
- Publication date May 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsun-Cheng Tang
- G01 - MEASURING TESTING