Tsunayuki Kimura

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of stabilizing film quality of low-dielectric constant film
- Patent number 7,560,144
- Issue date Jul 14, 2009
- ASM Japan K.K.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of stabilizing film quality of low-dielectric constant film
- Publication number 20060216433
- Publication date Sep 28, 2006
- ASM JAPAN K.K.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...