Tsunehiko Nakamura

Person

Kokubu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Joined assembly, wafer holding assembly, attaching structure thereo...
- Patent number 8,956,459
- Issue date Feb 17, 2015
- Kyocera Corporation
- Tsunehiko Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer heating apparatus and semiconductor manufacturing apparatus
- Patent number 8,519,309
- Issue date Aug 27, 2013
- Kyocera Corporation
- Keiji Iwata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer heating apparatus and semiconductor manufacturing apparatus
- Patent number 8,071,916
- Issue date Dec 6, 2011
- Kyocera Corporation
- Keiji Iwata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck and wafer holding member and wafer treatment me...
- Patent number 7,646,580
- Issue date Jan 12, 2010
- Kyocera Corporation
- Tsunehiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 7,457,098
- Issue date Nov 25, 2008
- Kyocera Corporation
- Tsunehiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater, wafer heating apparatus and method for manufacturing heater
- Patent number 7,417,206
- Issue date Aug 26, 2008
- Kyocera Corporation
- Tsunehiko Nakamura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heater for heating a wafer and method for fabricating the same
- Patent number 7,361,865
- Issue date Apr 22, 2008
- Kyocera Corporation
- Seiichirou Maki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck
- Patent number 7,248,456
- Issue date Jul 24, 2007
- Kyocera Corporation
- Tsunehiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer heating apparatus
- Patent number 6,914,222
- Issue date Jul 5, 2005
- Kyocera Corporation
- Tsunehiko Nakamura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Non-magnetic ceramics for recording/reproducing heads and method of...
- Patent number 5,648,303
- Issue date Jul 15, 1997
- Kyocera Corporation
- Tsunehiko Nakamura
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

Patents Applicationslast 30 patents

Information Patent Application
Wafer Heating Apparatus and Semiconductor Manufacturing Apparatus
- Publication number 20100170884
- Publication date Jul 8, 2010
- Kyocera Corporation
- Keiji Iwata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Joined Assembly, Wafer Holding Assembly, Attaching Structure Thereo...
- Publication number 20090130825
- Publication date May 21, 2009
- KYOCERA CORPORATION
- Tsunehiko Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heater For Heating a Wafer and Method For Fabricating The Same
- Publication number 20080017632
- Publication date Jan 24, 2008
- Kyocera Corporation
- Seiichirou Maki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wafer Heating Apparatus And Semiconductor Manufacturing Apparatus
- Publication number 20080017627
- Publication date Jan 24, 2008
- KYOCERA CORPORATION
- Keiji Iwata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrostatic Chuck
- Publication number 20070247779
- Publication date Oct 25, 2007
- Kyocera Corporation
- Tsunehiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck and wafer holding member and wafer treatment me...
- Publication number 20060209490
- Publication date Sep 21, 2006
- KYOCERA CORPORATION
- Tsunehiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heater, wafer heating apparatus and method for manufacturing heater
- Publication number 20060096972
- Publication date May 11, 2006
- KYOCERA CORPORATION
- Tsunehiko Nakamura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Ceramic heater, wafer heating device using thereof and method for m...
- Publication number 20060000822
- Publication date Jan 5, 2006
- KYOCERA CORPORATION
- Tsunehiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heater for heating a wafer and method for fabricating the same
- Publication number 20050252903
- Publication date Nov 17, 2005
- KYOCERA CORPORATION
- Seiichirou Maki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wafer supporting member
- Publication number 20050215073
- Publication date Sep 29, 2005
- KYOCERA CORPORATION
- Tsunehiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck
- Publication number 20040218339
- Publication date Nov 4, 2004
- KYOCERA CORPORATION
- Tsunehiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer heating apparatus
- Publication number 20040149719
- Publication date Aug 5, 2004
- KYOCERA CORPORATION
- Tsunehiko Nakamura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Tsunehiko Nakamura

Person

Patents Grantslast 30 patents

Joined assembly, wafer holding assembly, attaching structure thereo...

Wafer heating apparatus and semiconductor manufacturing apparatus

Wafer heating apparatus and semiconductor manufacturing apparatus

Electrostatic chuck and wafer holding member and wafer treatment me...

Electrostatic chuck

Heater, wafer heating apparatus and method for manufacturing heater

Heater for heating a wafer and method for fabricating the same

Electrostatic chuck

Wafer heating apparatus

Non-magnetic ceramics for recording/reproducing heads and method of...

Patents Applicationslast 30 patents

Wafer Heating Apparatus and Semiconductor Manufacturing Apparatus

Joined Assembly, Wafer Holding Assembly, Attaching Structure Thereo...

Heater For Heating a Wafer and Method For Fabricating The Same

Wafer Heating Apparatus And Semiconductor Manufacturing Apparatus

Electrostatic Chuck

Electrostatic chuck and wafer holding member and wafer treatment me...

Heater, wafer heating apparatus and method for manufacturing heater

Ceramic heater, wafer heating device using thereof and method for m...

Heater for heating a wafer and method for fabricating the same

Wafer supporting member

Electrostatic chuck

Wafer heating apparatus