Tsunehito KOHYAMA

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Mask inspection method and mask inspection apparatus
- Patent number 12,050,184
- Issue date Jul 30, 2024
- Lasertec Corporation
- Keita Saito
- G01 - MEASURING TESTING
Information Patent Grant
Optical device, and method for preventing contamination of optical...
- Patent number 11,353,802
- Issue date Jun 7, 2022
- Lasertec Corporation
- Haruhiko Kusunose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Correction method, correction apparatus, and inspection apparatus
- Patent number 10,706,527
- Issue date Jul 7, 2020
- Lasertec Corporation
- Tsunehito Kohyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Detection method, inspection method, detection apparatus, and inspe...
- Patent number 10,539,511
- Issue date Jan 21, 2020
- Lasertec Corporation
- Masayasu Nishizawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PHOTODETECTOR
- Publication number 20240402592
- Publication date Dec 5, 2024
- Lasertec Corporation
- Keita SAITO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, AND NON-TR...
- Publication number 20240292511
- Publication date Aug 29, 2024
- Lasertec Corporation
- Keitaro HAYASHIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
POSITION DETECTION APPARATUS, POSITION DETECTION METHOD AND NON-TRA...
- Publication number 20240074022
- Publication date Feb 29, 2024
- Lasertec Corporation
- Tsunehito KOHYAMA
- G01 - MEASURING TESTING
Information Patent Application
MASK INSPECTION METHOD AND MASK INSPECTION APPARATUS
- Publication number 20220178847
- Publication date Jun 9, 2022
- Lasertec Corporation
- Keita SAITO
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL DEVICE, AND METHOD FOR PREVENTING CONTAMINATION OF OPTICAL...
- Publication number 20210373447
- Publication date Dec 2, 2021
- Lasertec Corporation
- Haruhiko KUSUNOSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20210247323
- Publication date Aug 12, 2021
- Lasertec Corporation
- Kiwamu TAKEHISA
- G01 - MEASURING TESTING
Information Patent Application
DETECTION METHOD, INSPECTION METHOD, DETECTION APPARATUS, AND INSPE...
- Publication number 20190204235
- Publication date Jul 4, 2019
- Lasertec Corporation
- Masayasu NISHIZAWA
- G01 - MEASURING TESTING
Information Patent Application
CORRECTION METHOD, CORRECTION APPARATUS, AND INSPECTION APPARATUS
- Publication number 20180276812
- Publication date Sep 27, 2018
- Lasertec Corporation
- Tsunehito KOHYAMA
- G06 - COMPUTING CALCULATING COUNTING

Tsunehito KOHYAMA

Person

Patents Grantslast 30 patents

Mask inspection method and mask inspection apparatus

Optical device, and method for preventing contamination of optical...

Correction method, correction apparatus, and inspection apparatus

Detection method, inspection method, detection apparatus, and inspe...

Patents Applicationslast 30 patents

PHOTODETECTOR

POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, AND NON-TR...

POSITION DETECTION APPARATUS, POSITION DETECTION METHOD AND NON-TRA...

MASK INSPECTION METHOD AND MASK INSPECTION APPARATUS

OPTICAL DEVICE, AND METHOD FOR PREVENTING CONTAMINATION OF OPTICAL...

INSPECTION DEVICE AND INSPECTION METHOD

DETECTION METHOD, INSPECTION METHOD, DETECTION APPARATUS, AND INSPE...

CORRECTION METHOD, CORRECTION APPARATUS, AND INSPECTION APPARATUS