Tsunemoto OGATA

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Koshi City, Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,935,736
- Issue date Mar 19, 2024
- Tokyo Electron Limited
- Rintaro Higuchi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240304452
- Publication date Sep 12, 2024
- Tokyo Electron Limited
- Tsunemoto OGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20240001410
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Tsunemoto Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210313171
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Rintaro HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS