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Tsunenaga Nakashima
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Kumamoto-Ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate cleaning method, processing container cleaning method, an...
Patent number
11,865,590
Issue date
Jan 9, 2024
Tokyo Electron Limited
Kyoko Ikeda
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,630,392
Issue date
Apr 18, 2023
Tokyo Electron Limited
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method, processing container cleaning method, an...
Patent number
11,504,751
Issue date
Nov 22, 2022
Tokyo Electron Limited
Kyoko Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment solution supply apparatus and substrate treatment system
Patent number
10,807,027
Issue date
Oct 20, 2020
Tokyo Electron Limited
Katsunori Ichino
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
Patent number
10,643,872
Issue date
May 5, 2020
Tokyo Electron Limited
Masahiro Abe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment system, substrate transfer method and computer...
Patent number
9,984,905
Issue date
May 29, 2018
Tokyo Electron Limited
Masahiro Nakaharada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment system, substrate transfer method and computer...
Patent number
9,984,904
Issue date
May 29, 2018
Tokyo Electron Limited
Masahiro Nakaharada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment system, substrate transfer method and computer...
Patent number
9,460,942
Issue date
Oct 4, 2016
Tokyo Electron Limited
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment system, substrate transfer method, and a non-tr...
Patent number
9,287,145
Issue date
Mar 15, 2016
Tokyo Electron Limited
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing apparatus
Patent number
D690330
Issue date
Sep 24, 2013
Tokyo Electron Limited
Masashi Tsuchiyama
D15 - Machines not elsewhere specified
Information
Patent Grant
Process liquid feed mechanism
Patent number
8,511,331
Issue date
Aug 20, 2013
Tokyo Electron Limited
Tsunenaga Nakashima
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Chemical liquid supply nozzle and chemical liquid supply method
Patent number
8,469,285
Issue date
Jun 25, 2013
Tokyo Electron Limited
Tsunenaga Nakashima
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Liquid treatment apparatus, mounting and dismounting method of a cu...
Patent number
8,354,141
Issue date
Jan 15, 2013
Tokyo Electron Limited
Tsunenaga Nakashima
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Wet processing system, wet processing method and storage medium
Patent number
8,236,378
Issue date
Aug 7, 2012
Tokyo Electron Limited
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid treatment apparatus, mounting and dismounting method of a cu...
Patent number
7,984,690
Issue date
Jul 26, 2011
Tokyo Electron Limited
Tsunenaga Nakashima
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Wet processing system, wet processing method and storage medium
Patent number
7,752,999
Issue date
Jul 13, 2010
Tokyo Electron Limited
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solution treatment apparatus and solution treatment method
Patent number
7,736,498
Issue date
Jun 15, 2010
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing method and liquid processing apparatus
Patent number
7,640,885
Issue date
Jan 5, 2010
Tokyo Electron Limited
Tsunenaga Nakashima
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Solution treatment apparatus and solution treatment method
Patent number
7,547,614
Issue date
Jun 16, 2009
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and method
Patent number
7,287,920
Issue date
Oct 30, 2007
Tokyo Electron Limited
Shinichi Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230402303
Publication date
Dec 14, 2023
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...
Publication number
20230063907
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Kyoko IKEDA
B08 - CLEANING
Information
Patent Application
LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTE...
Publication number
20230021035
Publication date
Jan 19, 2023
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20220399210
Publication date
Dec 15, 2022
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20220389574
Publication date
Dec 8, 2022
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...
Publication number
20220001426
Publication date
Jan 6, 2022
TOKYO ELECTRON LIMITED
Kyoko IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20200064741
Publication date
Feb 27, 2020
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TREATMENT SOLUTION SUPPLY APPARATUS AND SUBSTRATE TREATMENT SYSTEM
Publication number
20190076763
Publication date
Mar 14, 2019
TOKYO ELECTRON LIMITED
Katsunori ICHINO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
Publication number
20170358464
Publication date
Dec 14, 2017
TOKYO ELECTRON LIMITED
Masahiro Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
Publication number
20160372346
Publication date
Dec 22, 2016
TOKYO ELECTRON LIMITED
Masahiro NAKAHARADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
Publication number
20160372345
Publication date
Dec 22, 2016
TOKYO ELECTRON LIMITED
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL LIQUID CONTAINER REPLACEMENT DEVICE, CONTAINER MOUNTING MO...
Publication number
20150096682
Publication date
Apr 9, 2015
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
Publication number
20130112224
Publication date
May 9, 2013
TOKYO ELECTRON LIMITED
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND A NON-TR...
Publication number
20130112223
Publication date
May 9, 2013
TOKYO ELECTRON LIMITED
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS LIQUID FEED MECHANISM
Publication number
20110265896
Publication date
Nov 3, 2011
TOKYO ELECTRON LIMITED
Tsunenaga NAKASHIMA
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
LIQUID TREATMENT APPARATUS, MOUNTING AND DISMOUNTING METHOD OF A CU...
Publication number
20110220216
Publication date
Sep 15, 2011
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICAL LIQUID SUPPLY NOZZLE AND CHEMICAL LIQUID SUPPLY METHOD
Publication number
20110159701
Publication date
Jun 30, 2011
TOKYO ELECTRON LIMITED
Tsunenaga NAKASHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
WET PROCESSING SYSTEM, WET PROCESSING METHOD AND STORAGE MEDIUM
Publication number
20100216259
Publication date
Aug 26, 2010
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
Publication number
20090214759
Publication date
Aug 27, 2009
TOKYO ELECTRON LIMITED
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Complex pipe and coating/development processing apparatus equipped...
Publication number
20080289715
Publication date
Nov 27, 2008
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET PROCESSING SYSTEM, WET PROCESSING METHOD AND STORAGE MEDIUM
Publication number
20080100809
Publication date
May 1, 2008
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Liquid treatment apparatus, mounting and dismounting method of a cu...
Publication number
20080092813
Publication date
Apr 24, 2008
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Liquid processing method and liquid processing apparatus
Publication number
20070245953
Publication date
Oct 25, 2007
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Liquid processing method and liquid processing apparatus
Publication number
20060233952
Publication date
Oct 19, 2006
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor manufacturing apparatus and method
Publication number
20060194445
Publication date
Aug 31, 2006
TOKYO ELECTRON LIMITED
Shinichi Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Solution treatment apparatus and solution treatment method
Publication number
20060189103
Publication date
Aug 24, 2006
TOKYO ELECTRON LIMITED
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS