Tsuneo KANDA

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Management apparatus, exposure method, and method of manufacturing...
- Patent number 8,428,763
- Issue date Apr 23, 2013
- Canon Kabushiki Kaisha
- Tsuneo Kanda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and projection exposure apparatus
- Patent number 6,867,845
- Issue date Mar 15, 2005
- Canon Kabushiki Kaisha
- Tsuneo Kanda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and device manufacturing method using...
- Patent number 6,233,042
- Issue date May 15, 2001
- Canon Kabushiki Kaisha
- Tsuneo Kanda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination method and system having a first optical element at a...
- Patent number 5,808,724
- Issue date Sep 15, 1998
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and apparatus in which scanning exposure...
- Patent number 5,793,471
- Issue date Aug 11, 1998
- Canon Kabushiki Kaisha
- Tsuneo Kanda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with a function for controlling alignment by use...
- Patent number 5,140,366
- Issue date Aug 18, 1992
- Canon Kabushiki Kaisha
- Takahisa Shiozawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MANAGEMENT APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING...
- Publication number 20110063593
- Publication date Mar 17, 2011
- Canon Kabushiki Kaisha
- Tsuneo KANDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090170042
- Publication date Jul 2, 2009
- Canon Kabushiki Kaisha
- Tsuneo Kanda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY