Tsuneo Miyai

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, surface position adjustment unit, mask, and dev...
- Patent number 6,900,880
- Issue date May 31, 2005
- Nikon Corporation
- Yoshiki Kida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and projection exposure apparatus
- Patent number 5,936,711
- Issue date Aug 10, 1999
- Nikon Corporation
- Tsuneo Miyai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,825,470
- Issue date Oct 20, 1998
- Nikon Corporation
- Tsuneo Miyai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal distortion compensated projection exposure method and appar...
- Patent number 5,581,324
- Issue date Dec 3, 1996
- Nikon Corporation
- Tsuneo Miyai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus, surface position adjustment unit, mask, and dev...
- Publication number 20040036849
- Publication date Feb 26, 2004
- Nikon Corporation
- Yoshiki Kida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, surface position adjustment unit, mask, and dev...
- Publication number 20020003216
- Publication date Jan 10, 2002
- Nikon Corporation
- Yoshiki Kida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY