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Tsuneyuki Hagiwara
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last 30 patents
Information
Patent Grant
Image processing device, image processing program, image processing...
Patent number
11,928,794
Issue date
Mar 12, 2024
Nikon Corporation
Tsuneyuki Hagiwara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Exposure apparatus, exposure method, and method for producing device
Patent number
10,025,194
Issue date
Jul 17, 2018
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and method for producing device
Patent number
9,513,558
Issue date
Dec 6, 2016
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and method for producing device
Patent number
8,749,759
Issue date
Jun 10, 2014
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
8,305,553
Issue date
Nov 6, 2012
Nikon Corporation
Katsushi Nakano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and method for producing device
Patent number
8,139,198
Issue date
Mar 20, 2012
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Image plane measurement method, exposure method, device manufacturi...
Patent number
7,965,387
Issue date
Jun 21, 2011
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement method, exposure method, and device manufacturing method
Patent number
7,791,718
Issue date
Sep 7, 2010
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Best focus detection method, exposure method, and exposure apparatus
Patent number
7,566,893
Issue date
Jul 28, 2009
Nikon Corporation
Naota Konda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Patent number
7,474,386
Issue date
Jan 6, 2009
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Grant
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Patent number
7,365,830
Issue date
Apr 29, 2008
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Grant
Photomask blank substrate, photomask blank and photomask
Patent number
7,351,504
Issue date
Apr 1, 2008
Shin-Etsu Chemical Co., Ltd.
Masayuki Nakatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of making photomask blank substrates
Patent number
7,344,808
Issue date
Mar 18, 2008
Shin-Etsu Chemical Co., Ltd.
Tsuneo Numanami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of selecting photomask blank substrates
Patent number
7,329,475
Issue date
Feb 12, 2008
Shin-Estu Chemical Co., Ltd.
Masayuki Nakatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Patent number
7,230,680
Issue date
Jun 12, 2007
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Grant
Holding apparatus, holding method, exposure apparatus and device ma...
Patent number
7,081,946
Issue date
Jul 25, 2006
Nikon Corporation
Tsuneyuki Hagiwara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of selecting photomask blank substrates
Patent number
7,070,888
Issue date
Jul 4, 2006
Shin-Etsu Chemical Co., Ltd.
Masayuki Nakatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning exposure apparatus
Patent number
6,992,751
Issue date
Jan 31, 2006
Nikon Corporation
Shinichi Okita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for pattern exposure and method for adjusting...
Patent number
6,727,980
Issue date
Apr 27, 2004
Nikon Corporation
Kazuya Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning exposure apparatus
Patent number
6,538,721
Issue date
Mar 25, 2003
Nikon Corporation
Shinichi Okita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
6,381,004
Issue date
Apr 30, 2002
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical detection system for detecting defects and/or particles on...
Patent number
5,907,396
Issue date
May 25, 1999
Nikon Corporation
Koichiro Komatsu
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for detecting defects on a mask
Patent number
5,838,433
Issue date
Nov 17, 1998
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Defect inspecting apparatus and defect inspecting method
Patent number
5,798,831
Issue date
Aug 25, 1998
Nikon Corporation
Tsuneyuki Hagiwara
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting apparatus
Patent number
5,790,251
Issue date
Aug 4, 1998
Nikon Corporation
Tsuneyuki Hagiwara
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for observing a surface using polarized light
Patent number
5,764,363
Issue date
Jun 9, 1998
Nikon Corporation
Hiroshi Ooki
G02 - OPTICS
Information
Patent Grant
Optical scanning device and foreign matter inspection apparatus
Patent number
5,736,735
Issue date
Apr 7, 1998
Nikon Corporation
Tsuneyuki Hagiwara
G02 - OPTICS
Information
Patent Grant
Light source apparatus
Patent number
5,695,268
Issue date
Dec 9, 1997
Nikon Corporation
Tsuneyuki Hagiwara
G02 - OPTICS
Information
Patent Grant
Defect inspecting apparatus and defect inspecting method
Patent number
5,680,207
Issue date
Oct 21, 1997
Nikon Corporation
Tsuneyuki Hagiwara
G01 - MEASURING TESTING
Information
Patent Grant
Foreign matter inspection apparatus for large-scale substrate
Patent number
5,646,725
Issue date
Jul 8, 1997
Nikon Corporation
Tsuneyuki Hagiwara
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
IMAGE PROCESSING DEVICE, IMAGE PROCESSING PROGRAM, IMAGE PROCESSING...
Publication number
20210312596
Publication date
Oct 7, 2021
Nikon Corporation
Tsuneyuki HAGIWARA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
Publication number
20180348643
Publication date
Dec 6, 2018
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
Publication number
20170082925
Publication date
Mar 23, 2017
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
Publication number
20140240685
Publication date
Aug 28, 2014
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure Apparatus, Exposure Method, and Method for Producing Device
Publication number
20130027682
Publication date
Jan 31, 2013
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS AND DEVICE FABRICATING METHODS
Publication number
20090047607
Publication date
Feb 19, 2009
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Measurement Method, Exposure Method, and Device Manufacturing Method
Publication number
20080068595
Publication date
Mar 20, 2008
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, exposure method, and method for producing device
Publication number
20080042068
Publication date
Feb 21, 2008
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Best Focus Detection Method, Exposure Method, And Exposure Apparatus
Publication number
20080030715
Publication date
Feb 7, 2008
Nikon Corporation
Naoto Kondo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Measurement method, measurement unit, processing unit, pattern form...
Publication number
20080013090
Publication date
Jan 17, 2008
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure Apparatus and Device Manufacturing Method
Publication number
20070263182
Publication date
Nov 15, 2007
Nikon Corporation
Katsushi Nakano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Image Plane Measurement Method, Exposure Method, Device Manufacturi...
Publication number
20070260419
Publication date
Nov 8, 2007
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Publication number
20070177126
Publication date
Aug 2, 2007
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Application
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Publication number
20070177127
Publication date
Aug 2, 2007
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Application
Mark structure, mark measurement apparatus, pattern forming apparat...
Publication number
20070146708
Publication date
Jun 28, 2007
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, exposure method, and method for producing device
Publication number
20060181690
Publication date
Aug 17, 2006
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, exposure method, and method for producing device
Publication number
20060170891
Publication date
Aug 3, 2006
Nikon Corporation
Hisashi Nishinaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Holding apparatus, holding method, exposure apparatus and device ma...
Publication number
20060146312
Publication date
Jul 6, 2006
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of making photomask blank substrates
Publication number
20050020083
Publication date
Jan 27, 2005
Tsuneo Numanami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of selecting photomask blank substrates
Publication number
20050019676
Publication date
Jan 27, 2005
Masayuki Nakatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask blank substrate, photomask blank and photomask
Publication number
20050019677
Publication date
Jan 27, 2005
Masayuki Nakatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of selecting photomask blank substrates
Publication number
20050019678
Publication date
Jan 27, 2005
Masayuki Nakatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Publication number
20040185662
Publication date
Sep 23, 2004
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Application
Holding apparatus, holding method, exposure apparatus and device ma...
Publication number
20040100624
Publication date
May 27, 2004
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scanning exposure apparatus
Publication number
20030133088
Publication date
Jul 17, 2003
Nikon Corporation
Shinichi Okita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scanning exposure apparatus
Publication number
20020149755
Publication date
Oct 17, 2002
Nikon Corporation
Shinichi Okita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Aerial image measurement method and unit, optical properties measur...
Publication number
20020041377
Publication date
Apr 11, 2002
Nikon Corporation
Tsuneyuki Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for pattern exposure and method for adjusting...
Publication number
20020041368
Publication date
Apr 11, 2002
NIKON CORPORATION
Kazuya Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
scanning exposure apparatus
Publication number
20020021433
Publication date
Feb 21, 2002
Shinichi Okita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY