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Etch Stop Layer in Integrated Circuits
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Publication number 20220336348
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Publication date Oct 20, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shiu-Ko JangJian
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H01 - BASIC ELECTRIC ELEMENTS
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Etch Stop Layer in Integrated Circuits
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Publication number 20200350244
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Publication date Nov 5, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shiu-Ko JangJian
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H01 - BASIC ELECTRIC ELEMENTS
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Etch Stop Layer in Integrated Circuits
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Publication number 20190043805
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Publication date Feb 7, 2019
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Shiu-Ko JangJian
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H01 - BASIC ELECTRIC ELEMENTS
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Etch Stop Layer in Integrated Circuits
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Publication number 20160358854
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Publication date Dec 8, 2016
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Shiu-Ko JangJian
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H01 - BASIC ELECTRIC ELEMENTS
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ETCH STOP LAYER IN INTEGRATED CIRCUITS
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Publication number 20160111325
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Publication date Apr 21, 2016
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Shiu-Ko JangJian
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H01 - BASIC ELECTRIC ELEMENTS