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Tsung-Liang Chen
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Danvers, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
In-situ beam profile metrology
Patent number
10,665,421
Issue date
May 26, 2020
Applied Materials, Inc.
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for controllable non-volatile metal removal
Patent number
10,633,743
Issue date
Apr 28, 2020
Varian Semiconductor Equipment Associates, Inc.
Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Techniques for controlling ion/neutral ratio of a plasma source
Patent number
10,113,229
Issue date
Oct 30, 2018
Varian Semiconductor Equipment Associates, Inc.
Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for controllable non-volatile metal removal
Patent number
10,000,853
Issue date
Jun 19, 2018
Varian Semiconductor Equipment Associates, Inc.
Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and techniques to treat substrates using directional plas...
Patent number
10,004,133
Issue date
Jun 19, 2018
Varian Semiconductor Equipment Associates, Inc.
Shurong Liang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for filling a cavity using angled ion beam
Patent number
9,997,351
Issue date
Jun 12, 2018
Varian Semiconductor Equipment Associates, Inc.
Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and techniques to treat substrates using directional plas...
Patent number
9,706,634
Issue date
Jul 11, 2017
Varian Semiconductor Equipment Associates, Inc.
Shurong Liang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for controllable non-volatile metal removal
Patent number
9,611,552
Issue date
Apr 4, 2017
Varian Semiconductor Equipment Associates, Inc.
Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion beam activated directional deposition
Patent number
9,520,284
Issue date
Dec 13, 2016
Varian Semiconductor Equipment Associates, Inc.
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a dielectric film
Patent number
9,418,832
Issue date
Aug 16, 2016
Hung-Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate height uniformity in semiconductor devices
Patent number
9,349,814
Issue date
May 24, 2016
GLOBALFOUNDRIES Inc.
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduction of oxide recesses for gate height control
Patent number
9,257,516
Issue date
Feb 9, 2016
GLOBALFOUNDRIES Inc.
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate height uniformity in semiconductor devices
Patent number
9,093,560
Issue date
Jul 28, 2015
GLOBALFOUNDRIES Inc.
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a dielectric film
Patent number
8,993,446
Issue date
Mar 31, 2015
GlobalFoundries Inc.
Hung-Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Removal of nitride bump in opening replacement gate structure
Patent number
8,927,356
Issue date
Jan 6, 2015
GLOBALFOUNDRIES Inc.
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduction of oxide recesses for gate height control
Patent number
8,877,580
Issue date
Nov 4, 2014
GLOBALFOUNDRIES Inc.
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
In-situ Beam Profile Metrology
Publication number
20200118790
Publication date
Apr 16, 2020
Applied Materials, Inc.
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System And Method For Controllable Non-Volatile Metal Removal
Publication number
20180265988
Publication date
Sep 20, 2018
Varian Semiconductor Equipment Associates, Inc.
Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
Publication number
20170311430
Publication date
Oct 26, 2017
Shurong Liang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC MEMORY DEVICE AND TECHNIQUES FOR FORMING
Publication number
20170294569
Publication date
Oct 12, 2017
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR CONTROLLING ION/NEUTRAL RATIO OF A PLASMA SOURCE
Publication number
20170178900
Publication date
Jun 22, 2017
Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND TECHNIQUES FOR FILLING A CAVITY USING ANGLED ION BEAM
Publication number
20170162384
Publication date
Jun 8, 2017
Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
System And Method For Controllable Non-Volatile Metal Removal
Publication number
20170159188
Publication date
Jun 8, 2017
Varian Semiconductor Equipment Associates, Inc.
Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
Publication number
20170042010
Publication date
Feb 9, 2017
Shurong Liang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System And Method For Controllable Non-Volatile Metal Removal
Publication number
20160265121
Publication date
Sep 15, 2016
Varian Semiconductor Equipment Associates, Inc.
Tsung-Liang Chen
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
GATE HEIGHT UNIFORMITY IN SEMICONDUCTOR DEVICES
Publication number
20150270364
Publication date
Sep 24, 2015
GLOBALFOUNDRIES INC.
Tsung-Liang CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Forming A Dielectric Film
Publication number
20150162188
Publication date
Jun 11, 2015
GLOBALFOUNDRIES INC.
Hung-Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE HEIGHT UNIFORMITY IN SEMICONDUCTOR DEVICES
Publication number
20150084131
Publication date
Mar 26, 2015
Tsung-Liang CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR ISOLATION REGION UNIFORMITY
Publication number
20150087134
Publication date
Mar 26, 2015
GLOBALFOUNDRIES INC.
Tsung-Liang CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCTION OF OXIDE RECESSES FOR GATE HEIGHT CONTROL
Publication number
20150048446
Publication date
Feb 19, 2015
GLOBALFOUNDRIES INC.
Tsung-Liang CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOVAL OF NITRIDE BUMP IN OPENING REPLACEMENT GATE STRUCTURE
Publication number
20140370697
Publication date
Dec 18, 2014
Tsung-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCTION OF OXIDE RECESSES FOR GATE HEIGHT CONTROL
Publication number
20140339642
Publication date
Nov 20, 2014
Tsung-Liang CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING A DIELECTRIC FILM
Publication number
20140315385
Publication date
Oct 23, 2014
GLOBAL FOUNDRIES Inc.
Hung-Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING INTEGRATED CIRCUITS HAVING A COMPRESSIVE N...
Publication number
20140183720
Publication date
Jul 3, 2014
International Business Machines Corporation
Scott Beasor
H01 - BASIC ELECTRIC ELEMENTS