Tsung-Mu Lai

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Single bodied platen housing a detection module for CMP systems
- Patent number 11,975,421
- Issue date May 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsung-Lung Lai
- B24 - GRINDING POLISHING
Information Patent Grant
Monolithic platen
- Patent number 11,919,126
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Lung Lai
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical planarization membrane
- Patent number 11,850,702
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Ping Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Single bodied platen housing a detection module for CMP systems
- Patent number 11,571,782
- Issue date Feb 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsung-Lung Lai
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical planarization membrane
- Patent number 11,267,099
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Ping Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Monolithic platen
- Patent number 11,020,837
- Issue date Jun 1, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Lung Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of fabricating a micromechanical structure
- Patent number 8,278,724
- Issue date Oct 2, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hua Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for wafer bonding
- Patent number 7,732,299
- Issue date Jun 8, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fa-Yuan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structures
- Patent number 7,728,396
- Issue date Jun 1, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hua-Shu Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating a micromechanical structure
- Patent number 7,468,327
- Issue date Dec 23, 2008
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hua Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-lens and micro-lens fabrication method
- Patent number 7,295,374
- Issue date Nov 13, 2007
- Taiwan Semiconductor Manufacturing Co. Ltd.
- Ming-Chih Chang
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Ink-channel wafer integrated with CMOS wafer for inkjet printhead a...
- Patent number 7,255,425
- Issue date Aug 14, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Mu Lai
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Semiconductor methods and structures
- Patent number 7,198,975
- Issue date Apr 3, 2007
- Taiwan Semiconductor Manufacturing Company
- Hua-Shu Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
End point detection method for forming a patterned silicon layer
- Patent number 6,573,188
- Issue date Jun 3, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsung-Mu Lai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MONOLITHIC PLATEN
- Publication number 20240181598
- Publication date Jun 6, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Tsung-Lung LAI
- B24 - GRINDING POLISHING
Information Patent Application
SINGLE BODIED PLATEN HOUSING A DETECTION MODULE FOR CMP SYSTEMS
- Publication number 20230133331
- Publication date May 4, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Lung Lai
- B24 - GRINDING POLISHING
Information Patent Application
FITTINGS FOR WAFER CLEANING SYSTEMS
- Publication number 20230051164
- Publication date Feb 16, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Cheng-Ping Chen
- B08 - CLEANING
Information Patent Application
CHEMICAL MECHANICAL PLANARIZATION MEMBRANE
- Publication number 20220184773
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Ping Chen
- B24 - GRINDING POLISHING
Information Patent Application
SINGLE BODIED PLATEN HOUSING A DETECTION MODULE FOR CMP SYSTEMS
- Publication number 20200164481
- Publication date May 28, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Lung Lai
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL PLANARIZATION MEMBRANE
- Publication number 20190091829
- Publication date Mar 28, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Ping Chen
- B24 - GRINDING POLISHING
Information Patent Application
METHODS OF FABRICATING A MICROMECHANICAL STRUCTURE
- Publication number 20090065908
- Publication date Mar 12, 2009
- Chia-Hua Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process For Wafer Bonding
- Publication number 20080194076
- Publication date Aug 14, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fa-Yuan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods of fabricating a micromechanical structure
- Publication number 20070287213
- Publication date Dec 13, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hua Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURES
- Publication number 20070145366
- Publication date Jun 28, 2007
- Taiwan Semiconductor Manufacturing Co., LTD
- Hua-Shu Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-lens micro-lens fabrication method
- Publication number 20060193054
- Publication date Aug 31, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Chih Chang
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Three dimensional structure formed by using an adhesive silicon waf...
- Publication number 20060189023
- Publication date Aug 24, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fa-Yuan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor methods and structures
- Publication number 20060131697
- Publication date Jun 22, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hua-Shu Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ink-channel wafer integrated with CMOS wafer for inkjet printhead a...
- Publication number 20060119662
- Publication date Jun 8, 2006
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Mu Lai
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS

Tsung-Mu Lai

Person

Patents Grantslast 30 patents

Single bodied platen housing a detection module for CMP systems

Monolithic platen

Chemical mechanical planarization membrane

Single bodied platen housing a detection module for CMP systems

Chemical mechanical planarization membrane

Monolithic platen

Methods of fabricating a micromechanical structure

Process for wafer bonding

Semiconductor structures

Methods of fabricating a micromechanical structure

Micro-lens and micro-lens fabrication method

Ink-channel wafer integrated with CMOS wafer for inkjet printhead a...

Semiconductor methods and structures

End point detection method for forming a patterned silicon layer

Patents Applicationslast 30 patents

MONOLITHIC PLATEN

SINGLE BODIED PLATEN HOUSING A DETECTION MODULE FOR CMP SYSTEMS

FITTINGS FOR WAFER CLEANING SYSTEMS

CHEMICAL MECHANICAL PLANARIZATION MEMBRANE

SINGLE BODIED PLATEN HOUSING A DETECTION MODULE FOR CMP SYSTEMS

CHEMICAL MECHANICAL PLANARIZATION MEMBRANE

METHODS OF FABRICATING A MICROMECHANICAL STRUCTURE

Process For Wafer Bonding

Methods of fabricating a micromechanical structure

SEMICONDUCTOR STRUCTURES

Micro-lens micro-lens fabrication method

Three dimensional structure formed by using an adhesive silicon waf...

Semiconductor methods and structures

Ink-channel wafer integrated with CMOS wafer for inkjet printhead a...