Tsung-Wen Tien

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Critical dimension controlled method of plasma descum for conventio...
- Patent number 6,309,976
- Issue date Oct 30, 2001
- Taiwan Semiconductor Manufacturing Company
- Tzy-Ying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY