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NANTOU COUNTY, TW
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last 30 patents
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Patent Grant
Air-blown cleaning system for photomasks and method thereof
Patent number
9,296,023
Issue date
Mar 29, 2016
Gudeng Precision Industrial Co., Ltd.
Yung-Chin Pan
B08 - CLEANING
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last 30 patents
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Patent Application
CHUCK STRUCTURE FOR SUBSTRATE CLEANSING EQUIPMENT
Publication number
20140291942
Publication date
Oct 2, 2014
GUDENG PRECISION INDUSTRIAL CO., LTD.
AN-PANG WANG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
AIR-BLOWN CLEANING SYSTEM FOR PHOTOMASKS AND METHOD THEREOF
Publication number
20140150824
Publication date
Jun 5, 2014
YUNG-CHIN PAN
B08 - CLEANING