Tsungnan Cheng

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Saratoga, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Polishing pad shaping and patterning
- Patent number 6,315,857
- Issue date Nov 13, 2001
- Mosel Vitelic, Inc.
- Tsungnan Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for distribution of slurry in a chemical mecha...
- Patent number 6,280,297
- Issue date Aug 28, 2001
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for distribution of slurry in a chemical mecha...
- Patent number 6,051,499
- Issue date Apr 18, 2000
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad in a chemical...
- Patent number 6,019,670
- Issue date Feb 1, 2000
- Applied Materials, Inc.
- Tsungnan Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Modular wafer polishing apparatus and method
- Patent number 5,957,764
- Issue date Sep 28, 1999
- Aplex, Inc.
- H. Alexander Anderson
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for using a retaining ring to control the edge...
- Patent number 5,795,215
- Issue date Aug 18, 1998
- Applied Materials, Inc.
- William L. Guthrie
- B24 - GRINDING POLISHING