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Yamanashi-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Liquid processing method, liquid processing apparatus and recording...
Patent number
8,741,070
Issue date
Jun 3, 2014
Tokyo Electron Limited
Nobutaka Mizutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silylation treatment unit and method
Patent number
6,872,670
Issue date
Mar 29, 2005
Tokyo Electron Limited
Takayuki Toshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Developing method and developing apparatus
Patent number
6,713,239
Issue date
Mar 30, 2004
Tokyo Electron Limited
Takayuki Toshima
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Silylation treatment unit and method
Patent number
6,709,523
Issue date
Mar 23, 2004
Tokyo Electron Limited
Takayuki Toshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
6,706,322
Issue date
Mar 16, 2004
Tokyo Electron Limited
Kiyohisa Tateyama
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method
Patent number
6,682,777
Issue date
Jan 27, 2004
Tokyo Electron Limited
Tsutae Omori
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Coating apparatus and coating method
Patent number
6,635,113
Issue date
Oct 21, 2003
Tokyo Electron Limited
Hideyuki Takamori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Developing method and developing apparatus
Patent number
6,491,452
Issue date
Dec 10, 2002
Tokyo Electron Limited
Nobuo Konishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Film forming apparatus
Patent number
6,458,208
Issue date
Oct 1, 2002
Tokyo Electron Limited
Noriyuki Anai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Developing method and developing apparatus
Patent number
6,398,429
Issue date
Jun 4, 2002
Tokyo Electron Limited
Takayuki Toshima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
6,361,600
Issue date
Mar 26, 2002
Tokyo Electron Limited
Kiyohisa Tateyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method
Patent number
6,306,455
Issue date
Oct 23, 2001
Tokyo Electron Limited
Hideyuki Takamori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Developing method and developing apparatus
Patent number
6,238,848
Issue date
May 29, 2001
Tokyo Electron Limited
Nobuo Konishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,203,218
Issue date
Mar 20, 2001
Tokyo Electron Ltd.
Tsutae Omori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Film forming method
Patent number
6,165,552
Issue date
Dec 26, 2000
Tokyo Electron Ltd
Noriyuki Anai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for manufacturing a semiconductor for a liquid crystal di...
Patent number
D415776
Issue date
Oct 26, 1999
Tokyo Electron Limited
Noriyuki Anai
D15 - Machines not elsewhere specified
Information
Patent Grant
Apparatus for manufacturing a semiconductor for a liquid crystal di...
Patent number
D415184
Issue date
Oct 12, 1999
Tokyo Electron Limited
Noriyuki Anai
D15 - Machines not elsewhere specified
Information
Patent Grant
Method of forming a coating film and coating apparatus
Patent number
5,803,970
Issue date
Sep 8, 1998
Tokyo Electron Limited
Kiyohisa Tateyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a coating film
Patent number
5,695,817
Issue date
Dec 9, 1997
Tokyo Electron Limited
Kiyohisa Tateyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Hydrophobic treatment method involving delivery of a liquid process...
Patent number
5,681,614
Issue date
Oct 28, 1997
Tokyo Electron Limited
Tsutae Omori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hydrophobic processing apparatus including a liquid delivery system
Patent number
5,505,781
Issue date
Apr 9, 1996
Tokyo Electron Limited
Tsutae Omori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Liquid Processing Method, Liquid Processing Apparatus and Recording...
Publication number
20120160273
Publication date
Jun 28, 2012
TOKYO ELECTRON LIMITED
Nobutaka MIZUTANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Silylation treatment unit and method
Publication number
20040142580
Publication date
Jul 22, 2004
TOKYO ELECTRON LIMITED
Takayuki Toshima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COATING APPARATUS AND COATING METHOD
Publication number
20020152954
Publication date
Oct 24, 2002
HIDEYUKI TAKAMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Developing method and developing apparatus
Publication number
20020122670
Publication date
Sep 5, 2002
Takayuki Toshima
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Film forming apparatus and film forming method
Publication number
20020071910
Publication date
Jun 13, 2002
Kiyohisa Tateyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing method
Publication number
20020025375
Publication date
Feb 28, 2002
Hideyuki Takamori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Developing method and developing apparatus
Publication number
20010012456
Publication date
Aug 9, 2001
Nobuo Konishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY