Tsutomo Shoki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Reflective mask blank having a programmed defect and method of prod...
- Patent number 7,282,305
- Issue date Oct 16, 2007
- Hoya Corporation
- Tsutomo Shoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Reflective mask blank having a programmed defect and method of prod...
- Publication number 20040175633
- Publication date Sep 9, 2004
- Hoya Corporation
- Tsutomo Shoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...