Tsutomu Doi

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and processing apparatus
- Patent number 6,374,834
- Issue date Apr 23, 2002
- Shin-Etsu Handotai Co., Ltd.
- Tatsuo Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin-processing apparatus and spin-processing method
- Patent number 6,192,903
- Issue date Feb 27, 2001
- Shibaura Mechatronics Corporation
- Tsutomu Doi
- B08 - CLEANING