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Tsutomu Haraoka
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Sagamihara, JP
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last 30 patents
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Patent Grant
Heat treatment method and device
Patent number
5,645,419
Issue date
Jul 8, 1997
Tokyo Electron Kabushiki Kaisha
Tetsu Ohsawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Heat treatment process for wafers
Patent number
5,500,388
Issue date
Mar 19, 1996
Tokyo Electron Kabushiki Kaisha
Reiji Niino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...