Tsutomu Karimata

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum connection mechanism and electron optical device
- Patent number 11,545,335
- Issue date Jan 3, 2023
- Ebara Corporation
- Takashi Ohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam irradiation apparatus and electron beam alignment method
- Patent number 11,515,118
- Issue date Nov 29, 2022
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustment method and electron beam device
- Patent number 11,217,421
- Issue date Jan 4, 2022
- Ebara Corporation
- Takehide Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coil-integrated-type yoke and manufacturing method of the same
- Patent number 11,164,697
- Issue date Nov 2, 2021
- Ebara Corporation
- Keisuke Matsushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate valve
- Patent number 10,900,573
- Issue date Jan 26, 2021
- Ebara Corporation
- Tsutomu Karimata
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,601,302
- Issue date Mar 21, 2017
- Ebara Corporation
- Shoji Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 9,406,480
- Issue date Aug 2, 2016
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 9,368,314
- Issue date Jun 14, 2016
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 9,134,261
- Issue date Sep 15, 2015
- Ebara Corporation
- Shoji Yoshikawa
- G01 - MEASURING TESTING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,946,631
- Issue date Feb 3, 2015
- Ebara Corporation
- Nobuharu Noji
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Sample observing device and sample observing method
- Patent number 8,884,225
- Issue date Nov 11, 2014
- Ebara Corporation
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 8,822,919
- Issue date Sep 2, 2014
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,803,103
- Issue date Aug 12, 2014
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector and inspecting apparatus
- Patent number 8,796,621
- Issue date Aug 5, 2014
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,742,341
- Issue date Jun 3, 2014
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection device
- Patent number 8,497,476
- Issue date Jul 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Detector and inspecting apparatus
- Patent number 8,431,892
- Issue date Apr 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,368,031
- Issue date Feb 5, 2013
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,053,726
- Issue date Nov 8, 2011
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 7,928,378
- Issue date Apr 19, 2011
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Detector and inspecting apparatus
- Patent number 7,928,382
- Issue date Apr 19, 2011
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,888,642
- Issue date Feb 15, 2011
- Ebara Corporation
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam apparatus and an aberration correction optical apparatus
- Patent number 7,863,580
- Issue date Jan 4, 2011
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sheet beam-type testing apparatus
- Patent number 7,829,871
- Issue date Nov 9, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,745,784
- Issue date Jun 29, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 7,741,601
- Issue date Jun 22, 2010
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,601,972
- Issue date Oct 13, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam inspection system and inspection method and method of...
- Patent number 7,569,838
- Issue date Aug 4, 2009
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and device production method using the elec...
- Patent number 7,439,502
- Issue date Oct 21, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF EVALUATING PRIMARY OPTICAL SYSTEM OF ELECTRON BEAM OBSERV...
- Publication number 20230393085
- Publication date Dec 7, 2023
- EBARA CORPORATION
- Kenji WATANABE
- G01 - MEASURING TESTING
Information Patent Application
ADJUSTMENT METHOD AND ELECTRON BEAM DEVICE
- Publication number 20210012997
- Publication date Jan 14, 2021
- EBARA CORPORATION
- Takehide HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM IRRADIATION APPARATUS AND ELECTRON BEAM ALIGNMENT METHOD
- Publication number 20200273658
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Kenji WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COIL-INTEGRATED-TYPE YOKE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20200066477
- Publication date Feb 27, 2020
- EBARA CORPORATION
- Keisuke MATSUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE
- Publication number 20200027686
- Publication date Jan 23, 2020
- EBARA CORPORATION
- Tsutomu KARIMATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CONNECTION MECHANISM AND ELECTRON OPTICAL DEVICE
- Publication number 20190279839
- Publication date Sep 12, 2019
- EBARA CORPORATION
- Takashi OHARA
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
INSPECTION DEVICE
- Publication number 20160307726
- Publication date Oct 20, 2016
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20150340193
- Publication date Nov 26, 2015
- EBARA CORPORATION
- Shoji YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20150122993
- Publication date May 7, 2015
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
- Publication number 20140367570
- Publication date Dec 18, 2014
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140319346
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20140158885
- Publication date Jun 12, 2014
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140034831
- Publication date Feb 6, 2014
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20140014848
- Publication date Jan 16, 2014
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20130228684
- Publication date Sep 5, 2013
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD
- Publication number 20130161511
- Publication date Jun 27, 2013
- EBARA CORPORATION
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20120235036
- Publication date Sep 20, 2012
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20120032079
- Publication date Feb 9, 2012
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...
- Publication number 20110104830
- Publication date May 5, 2011
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20110024623
- Publication date Feb 3, 2011
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20100237243
- Publication date Sep 23, 2010
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20090224151
- Publication date Sep 10, 2009
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPARATUS
- Publication number 20090218506
- Publication date Sep 3, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20090101816
- Publication date Apr 23, 2009
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20090050822
- Publication date Feb 26, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20090039262
- Publication date Feb 12, 2009
- EBARA CORPORATION
- Mamoru NAKASUJI
- G01 - MEASURING TESTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20090032708
- Publication date Feb 5, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS
- Publication number 20090014649
- Publication date Jan 15, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for inspection with electron beam, method for operating s...
- Publication number 20080308729
- Publication date Dec 18, 2008
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
SHEET BEAM-TYPE TESTING APPARATUS
- Publication number 20080302963
- Publication date Dec 11, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Tsutomu Karimata

Person

Patents Grantslast 30 patents

Vacuum connection mechanism and electron optical device

Electron beam irradiation apparatus and electron beam alignment method

Adjustment method and electron beam device

Coil-integrated-type yoke and manufacturing method of the same

Gate valve

Inspection device

Inspection apparatus

Testing apparatus using charged particles and device manufacturing...

Inspection system by charged particle beam and method of manufactur...

Inspection apparatus

Testing apparatus using charged particles and device manufacturing...

Sample observing device and sample observing method

Apparatus for inspection with electron beam, method for operating s...

Inspection system by charged particle beam and method of manufactur...

Detector and inspecting apparatus

Testing apparatus using charged particles and device manufacturing...

Inspection device

Detector and inspecting apparatus

Inspection system by charged particle beam and method of manufactur...

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Detector and inspecting apparatus

Electron beam apparatus and method of manufacturing semiconductor d...

Electron beam apparatus and an aberration correction optical apparatus

Sheet beam-type testing apparatus

Electron beam apparatus and method of manufacturing semiconductor d...

Testing apparatus using charged particles and device manufacturing...

Inspection system by charged particle beam and method of manufactur...

Electron beam inspection system and inspection method and method of...

Electron beam apparatus and device production method using the elec...

Patents Applicationslast 30 patents

METHOD OF EVALUATING PRIMARY OPTICAL SYSTEM OF ELECTRON BEAM OBSERV...

ADJUSTMENT METHOD AND ELECTRON BEAM DEVICE

ELECTRON BEAM IRRADIATION APPARATUS AND ELECTRON BEAM ALIGNMENT METHOD

COIL-INTEGRATED-TYPE YOKE AND MANUFACTURING METHOD OF THE SAME

GATE VALVE

VACUUM CONNECTION MECHANISM AND ELECTRON OPTICAL DEVICE

INSPECTION DEVICE

INSPECTION APPARATUS

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

INSPECTION DEVICE

DETECTOR AND INSPECTING APPARATUS

SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD

INSPECTION DEVICE

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...

DETECTOR AND INSPECTING APPARATUS

Testing apparatus using charged particles and device manufacturing...

DETECTOR AND INSPECTING APPARATUS

ELECTRON BEAM APPARATUS

Testing apparatus using charged particles and device manufacturing...

Electron beam apparatus and method of manufacturing semiconductor d...

ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...

Inspection system by charged particle beam and method of manufactur...

ELECTRON BEAM APPARATUS

Apparatus for inspection with electron beam, method for operating s...

SHEET BEAM-TYPE TESTING APPARATUS