Tsutomu Kato

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for processing substrate and substrate processing apparatus
- Patent number 9,768,012
- Issue date Sep 19, 2017
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,646,821
- Issue date May 9, 2017
- Hitachi Kokusai Electric, Inc.
- Tetsuo Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,206,931
- Issue date Dec 8, 2015
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 8,828,141
- Issue date Sep 9, 2014
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,741,063
- Issue date Jun 3, 2014
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 8,461,062
- Issue date Jun 11, 2013
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boat of wafer processing apparatus
- Patent number D655682
- Issue date Mar 13, 2012
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Boat of wafer processing apparatus
- Patent number D655255
- Issue date Mar 6, 2012
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Reaction tube
- Patent number D610559
- Issue date Feb 23, 2010
- Hitachi Kokusai Electric, Inc.
- Satoshi Okada
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
- Publication number 20220205089
- Publication date Jun 30, 2022
- Kokusai Electric Corporation
- Masanori SAKAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150243493
- Publication date Aug 27, 2015
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20150162184
- Publication date Jun 11, 2015
- Hitachi Kokusai Electric Inc.
- Tetsuo Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20140166145
- Publication date Jun 19, 2014
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20140170860
- Publication date Jun 19, 2014
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Exhaust Unit, Substrate Processing Apparatus, and Method of Manufac...
- Publication number 20130137279
- Publication date May 30, 2013
- Hitachi Kokusai Electric Inc.
- Tetsuo Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...
- Publication number 20120122318
- Publication date May 17, 2012
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20120079985
- Publication date Apr 5, 2012
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20100087069
- Publication date Apr 8, 2010
- Hitachi Kokusai Electric Inc.
- Hironobu MIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20100035437
- Publication date Feb 11, 2010
- Hitachi Kokusai Electric, Inc.
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for processing substrate and substrate processing apparatus
- Publication number 20100009079
- Publication date Jan 14, 2010
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and manufacturing method of semicond...
- Publication number 20090325389
- Publication date Dec 31, 2009
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090241834
- Publication date Oct 1, 2009
- Hitchi Kokusai Electric, Inc.
- Tsutomu KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method for manufacturing semicon...
- Publication number 20090223448
- Publication date Sep 10, 2009
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method for manufacturing semicon...
- Publication number 20090197424
- Publication date Aug 6, 2009
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20090035951
- Publication date Feb 5, 2009
- Hitachi Kokusai Electric Inc.
- Hironobu Miya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tsutomu Kato

Person

Patents Grantslast 30 patents

Method for processing substrate and substrate processing apparatus

Method of manufacturing semiconductor device

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method for manufacturing semicon...

Boat of wafer processing apparatus

Boat of wafer processing apparatus

Reaction tube

Patents Applicationslast 30 patents

Substrate Processing Apparatus, Substrate Processing Method, Method...

METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

Method of Manufacturing Semiconductor Device

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Exhaust Unit, Substrate Processing Apparatus, and Method of Manufac...

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...

METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Method for processing substrate and substrate processing apparatus

Substrate processing apparatus and manufacturing method of semicond...

SUBSTRATE PROCESSING APPARATUS

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing apparatus and method for manufacturing semicon...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE