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Tsutomu Makino
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Yokohama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Apparatus and method for photoresist removal processing
Patent number
8,141,567
Issue date
Mar 27, 2012
Kabushiki Kaisha Toshiba
Takahiko Wakatsuki
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
APPARATUS AND METHOD FOR PHOTORESIST REMOVAL PROCESSING
Publication number
20070277853
Publication date
Dec 6, 2007
Kabushiki Kaisha Toshiba
Takahiko Wakatsuki
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND METHOD
Publication number
20070256711
Publication date
Nov 8, 2007
Toshihide HAYASHI
B08 - CLEANING
Information
Patent Application
Assembly method of substrates and assembly apparatus of substrates
Publication number
20040089414
Publication date
May 13, 2004
SHIBAURA MECHATRONICS CORPORATION
Tsutomu Makino
G02 - OPTICS