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Tsutomu Makino
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
10,620,648
Issue date
Apr 14, 2020
ASM IP Holding B.V.
Phuc Hong Ninh
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Insulation system and substrate processing apparatus
Patent number
10,345,832
Issue date
Jul 9, 2019
ASM IP Holding B.V.
Phuc Hong Ninh
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Method for stabilizing plasma ignition
Patent number
8,742,668
Issue date
Jun 3, 2014
ASM IP Holdings B.V.
Ryu Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus
Patent number
7,945,345
Issue date
May 17, 2011
ASM Japan K.K.
Masahiro Takizawa
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for processing terminal of insulator coated ca...
Patent number
4,546,675
Issue date
Oct 15, 1985
Tokyo Shibaura Denki Kabushiki Kaisha
Tokio Okada
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS WITH CAPABILITIES OF AUTOMATIC DEVIC...
Publication number
20240210906
Publication date
Jun 27, 2024
ASM IP HOLDING B.V.
Tsutomu Makino
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20190346868
Publication date
Nov 14, 2019
ASM IP HOLDING B.V.
Phuc Hong NINH
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for Stabilizing Plasma Ignition
Publication number
20140062304
Publication date
Mar 6, 2014
ASM IP HOLDING B.V.
Ryu Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20100036517
Publication date
Feb 11, 2010
ASM JAPAN K.K.
MASAHIRO TAKIZAWA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Recipe operation using group function and/or subroutine function
Publication number
20070038324
Publication date
Feb 15, 2007
ASM JAPAN K.K.
Masahiro Takizawa
G05 - CONTROLLING REGULATING