Tsutomu Miki

Person

Yokkaichi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 11,897,077
- Issue date Feb 13, 2024
- Kioxia Corporation
- Tsutomu Miki
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
- Patent number 11,769,699
- Issue date Sep 26, 2023
- Kioxia Corporation
- Tsutomu Miki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus
- Patent number 11,376,708
- Issue date Jul 5, 2022
- Kioxia Corporation
- Syunichi Ono
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus, polishing method, and polishing control apparatus
- Patent number 11,110,565
- Issue date Sep 7, 2021
- TOSHIBA MEMORY CORPORATION
- Syunichi Ono
- G01 - MEASURING TESTING
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 10,850,363
- Issue date Dec 1, 2020
- TOSHIBA MEMORY CORPORATION
- Yukiteru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Control device and control method of semiconductor manufacturing ap...
- Patent number 10,553,507
- Issue date Feb 4, 2020
- TOSHIBA MEMORY CORPORATION
- Syunichi Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anomaly detection system and method of manufacturing semiconductor...
- Patent number 9,972,517
- Issue date May 15, 2018
- TOSHIBA MEMORY CORPORATION
- Tsutomu Miki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Process-state management system, management server and control serv...
- Patent number 7,324,855
- Issue date Jan 29, 2008
- Kabushiki Kaisha Toshiba
- Yukihiro Ushiku
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
CONTROL METHOD FOR PROCESSING OF A SUBSTRATE
- Publication number 20220266414
- Publication date Aug 25, 2022
- KIOXIA Corporation
- Tsutomu MIKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220266418
- Publication date Aug 25, 2022
- EBARA CORPORATION
- Yuta Suzuki
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...
- Publication number 20220059416
- Publication date Feb 24, 2022
- KIOXIA Corporation
- Tsutomu MIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20210283743
- Publication date Sep 16, 2021
- KIOXIA Corporation
- Tsutomu MIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20200078903
- Publication date Mar 12, 2020
- Toshiba Memory Corporation
- Syunichi ONO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS, POLISHING METHOD, AND POLISHING CONTROL APPARATUS
- Publication number 20190076985
- Publication date Mar 14, 2019
- Toshiba Memory Corporation
- Syunichi ONO
- B24 - GRINDING POLISHING
Information Patent Application
CONTROL DEVICE AND CONTROL METHOD OF SEMICONDUCTOR MANUFACTURING AP...
- Publication number 20170263512
- Publication date Sep 14, 2017
- Kabushiki Kaisha Toshiba
- Syunichi ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20160348238
- Publication date Dec 1, 2016
- Kabushiki Kaisha Toshiba
- Rempei Nakata
- C30 - CRYSTAL GROWTH
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20160207163
- Publication date Jul 21, 2016
- Kabushiki Kaisha Toshiba
- Yukiteru MATSUI
- G01 - MEASURING TESTING
Information Patent Application
ANOMALY DETECTION SYSTEM AND METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20160056064
- Publication date Feb 25, 2016
- Kabushiki Kaisha Toshiba
- TSUTOMU MIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process-state management system, management server and control serv...
- Publication number 20060064188
- Publication date Mar 23, 2006
- Yukihiro Ushiku
- G06 - COMPUTING CALCULATING COUNTING

Tsutomu Miki

Person

Patents Grantslast 30 patents

Semiconductor manufacturing apparatus

Semiconductor manufacturing apparatus and semiconductor manufacturi...

Polishing apparatus

Polishing apparatus, polishing method, and polishing control apparatus

Manufacturing method of semiconductor device and semiconductor manu...

Control device and control method of semiconductor manufacturing ap...

Anomaly detection system and method of manufacturing semiconductor...

Process-state management system, management server and control serv...

Patents Applicationslast 30 patents

CONTROL METHOD FOR PROCESSING OF A SUBSTRATE

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...

SEMICONDUCTOR MANUFACTURING APPARATUS

POLISHING APPARATUS

POLISHING APPARATUS, POLISHING METHOD, AND POLISHING CONTROL APPARATUS

CONTROL DEVICE AND CONTROL METHOD OF SEMICONDUCTOR MANUFACTURING AP...

FILM FORMING APPARATUS

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

ANOMALY DETECTION SYSTEM AND METHOD OF MANUFACTURING SEMICONDUCTOR...

Process-state management system, management server and control serv...