Tsutomu Murakawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus and method using a plurality of detecto...
- Patent number 9,236,218
- Issue date Jan 12, 2016
- Toppan Printing Co., Ltd.
- Tsutomu Murakawa
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 8,698,081
- Issue date Apr 15, 2014
- Advantest Corp.
- Takayuki Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask inspection apparatus and mask inspection method
- Patent number 8,675,948
- Issue date Mar 18, 2014
- Advantest Corp.
- Yoshiaki Ogiso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern-height measuring apparatus and pattern-height measuring method
- Patent number 8,604,431
- Issue date Dec 10, 2013
- Advantest Corp.
- Tsutomu Murakawa
- G01 - MEASURING TESTING
Information Patent Grant
Mask inspection apparatus and image generation method
- Patent number 8,559,697
- Issue date Oct 15, 2013
- Advantest Corp.
- Tsutomu Murakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask inspection apparatus and image creation method
- Patent number 8,071,943
- Issue date Dec 6, 2011
- Advantest Corp.
- Tsutomu Murakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
- Publication number 20140312225
- Publication date Oct 23, 2014
- Advantest Corporation
- Tsutomu Murakawa
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS
- Publication number 20140312224
- Publication date Oct 23, 2014
- Advantest Corporation
- Tsutomu Murakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN MEASUREMENT METHOD AND PATTERN MEASUREMENT APPARATUS
- Publication number 20130264480
- Publication date Oct 10, 2013
- Toppan Printing Co., Ltd.
- Tsutomu Murakawa
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection apparatus and pattern inspection method
- Publication number 20130068947
- Publication date Mar 21, 2013
- Takayuki Nakamura
- G01 - MEASURING TESTING
Information Patent Application
PATTERN-HEIGHT MEASURING APPARATUS AND PATTERN-HEIGHT MEASURING METHOD
- Publication number 20120217392
- Publication date Aug 30, 2012
- Tsutomu Murakawa
- G01 - MEASURING TESTING
Information Patent Application
Mask inspection apparatus and image generation method
- Publication number 20110249885
- Publication date Oct 13, 2011
- Tsutomu Murakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask inspection apparatus and mask inspection method
- Publication number 20110249108
- Publication date Oct 13, 2011
- Yoshiaki Ogiso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask inspection apparatus and image creation method
- Publication number 20100196804
- Publication date Aug 5, 2010
- Tsutomu Murakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tsutomu Murakawa

Person

Patents Grantslast 30 patents

Defect inspection apparatus and method using a plurality of detecto...

Pattern inspection apparatus and pattern inspection method

Mask inspection apparatus and mask inspection method

Pattern-height measuring apparatus and pattern-height measuring method

Mask inspection apparatus and image generation method

Mask inspection apparatus and image creation method

Patents Applicationslast 30 patents

DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS

PATTERN MEASUREMENT METHOD AND PATTERN MEASUREMENT APPARATUS

Pattern inspection apparatus and pattern inspection method

PATTERN-HEIGHT MEASURING APPARATUS AND PATTERN-HEIGHT MEASURING METHOD

Mask inspection apparatus and image generation method

Mask inspection apparatus and mask inspection method

Mask inspection apparatus and image creation method