Tsutomu NAGAI

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Kurokawa-gun, Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Placing table and plasma treatment apparatus
- Patent number 11,373,884
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placing table and plasma treatment apparatus
- Patent number 10,679,869
- Issue date Jun 9, 2020
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mounting table and substrate processing apparatus
- Patent number 9,093,487
- Issue date Jul 28, 2015
- Tokyo Electron Limited
- Tsutomu Nagai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
- Publication number 20230268216
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Shinya ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND PLASMA TREATMENT APPARATUS
- Publication number 20200266081
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND PLASMA TREATMENT APPARATUS
- Publication number 20170140954
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20130342952
- Publication date Dec 26, 2013
- TOKYO ELECTRON LIMITED
- Tsutomu NAGAI
- H01 - BASIC ELECTRIC ELEMENTS