Tsutomu OKABE

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Circulating EFEM
- Patent number 11,515,177
- Issue date Nov 29, 2022
- TDK Corporation
- Hiroshi Igarashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EFEM and method of introducing replacement gas thereinto
- Patent number 11,145,529
- Issue date Oct 12, 2021
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EFEM and method of introducing dry air thereinto
- Patent number 11,133,208
- Issue date Sep 28, 2021
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circulating EFEM
- Patent number 11,049,736
- Issue date Jun 29, 2021
- TDK Corporation
- Hiroshi Igarashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling method for a wafer transportation part and a load port...
- Patent number 10,566,227
- Issue date Feb 18, 2020
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mini-environment apparatus
- Patent number 10,340,157
- Issue date Jul 2, 2019
- TDK Corporation
- Tsutomu Okabe
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
EFEM
- Patent number 10,304,702
- Issue date May 28, 2019
- TDK Corporation
- Tsutomu Okabe
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Load port device and cleaning gas introducing method into a contain...
- Patent number 10,090,182
- Issue date Oct 2, 2018
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port apparatus and clamping device to be used for the same
- Patent number 9,401,295
- Issue date Jul 26, 2016
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid opening/closing system for closed container and substrate proce...
- Patent number 9,349,627
- Issue date May 24, 2016
- TDK Corporation
- Tsutomu Okabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate storage pod and lid member thereof, and processing appara...
- Patent number 8,893,753
- Issue date Nov 25, 2014
- TDK Corporation
- Tsutomu Okabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate storage pod and lid opening/closing system for the same
- Patent number 8,876,173
- Issue date Nov 4, 2014
- TDK Corporation
- Hiroshi Igarashi
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Grant
Lid opening/closing system for closed container
- Patent number 8,657,346
- Issue date Feb 25, 2014
- TDK Corporation
- Tsutomu Okabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Closed container and lid opening/closing system therefor
- Patent number 8,528,947
- Issue date Sep 10, 2013
- TDK Corporation
- Hiroshi Igarashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate storage pod with replacement function of clean gas
- Patent number 8,522,836
- Issue date Sep 3, 2013
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid opening/closing system of an airtight container
- Patent number 8,413,693
- Issue date Apr 9, 2013
- TDK Corporation
- Tsutomu Okabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lid opening/closing system of an airtight container
- Patent number 8,375,998
- Issue date Feb 19, 2013
- TDK Corporation
- Tsutomu Okabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Closed container and lid opening/closing system therefor
- Patent number 8,322,759
- Issue date Dec 4, 2012
- TDK Corporation
- Tsutomu Okabe
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Grant
Method of processing an object in a container and lid opening/closi...
- Patent number 8,302,637
- Issue date Nov 6, 2012
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contained object transfer system
- Patent number 8,186,927
- Issue date May 29, 2012
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for opening/closing lid of closed container, g...
- Patent number 8,171,964
- Issue date May 8, 2012
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid opening/closing system of an airtight container
- Patent number 8,082,955
- Issue date Dec 27, 2011
- TDK Corporation
- Tsutomu Okabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Contained object transfer system
- Patent number 8,083,456
- Issue date Dec 27, 2011
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas replacement system
- Patent number 8,061,738
- Issue date Nov 22, 2011
- TDK Corporation
- Tsutomu Okabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lid opening/closing system of an airtight container
- Patent number 7,841,371
- Issue date Nov 30, 2010
- TDK Corporation
- Tsutomu Okabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lid opening/closing system for closed container and substrate proce...
- Patent number 7,789,609
- Issue date Sep 7, 2010
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid opening/closing system of an airtight container
- Patent number 7,726,353
- Issue date Jun 1, 2010
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus having dust proof function
- Patent number 7,670,095
- Issue date Mar 2, 2010
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pod clamping unit in pod opener, pod corresponding to pod clamping...
- Patent number 7,621,714
- Issue date Nov 24, 2009
- TDK Corporation
- Toshihiko Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus having dust proof function
- Patent number 7,614,840
- Issue date Nov 10, 2009
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CIRCULATING EFEM
- Publication number 20210287918
- Publication date Sep 16, 2021
- TDK Corporation
- Hiroshi IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CIRCULATING EFEM
- Publication number 20190341273
- Publication date Nov 7, 2019
- TDK Corporation
- Hiroshi IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM AND METHOD OF INTRODUCING DRY AIR THEREINTO
- Publication number 20190013227
- Publication date Jan 10, 2019
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM AND METHOD OF INTRODUCING REPLACEMENT GAS THEREINTO
- Publication number 20180350647
- Publication date Dec 6, 2018
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLING METHOD FOR A WAFER TRANSPORTATION PART AND A LOAD PORT P...
- Publication number 20170170044
- Publication date Jun 15, 2017
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT DEVICE AND CLEANING GAS INTRODUCING METHOD INTO A CONTAIN...
- Publication number 20170170045
- Publication date Jun 15, 2017
- TDK Corporation
- Tsutomu OKABE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
MINI-ENVIRONMENT APPARATUS
- Publication number 20170170033
- Publication date Jun 15, 2017
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM
- Publication number 20170170042
- Publication date Jun 15, 2017
- TDK Corporation
- Tsutomu OKABE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
LOAD PORT APPARATUS AND CLAMPING DEVICE TO BE USED FOR THE SAME
- Publication number 20130028688
- Publication date Jan 31, 2013
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER
- Publication number 20120261031
- Publication date Oct 18, 2012
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER
- Publication number 20120060972
- Publication date Mar 15, 2012
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORAGE POD AND LID OPENING/CLOSING SYSTEM FOR THE SAME
- Publication number 20110215028
- Publication date Sep 8, 2011
- TDK Corporation
- Hiroshi Igarashi
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Application
SUBSTRATE STORAGE POD AND LID MEMBER THEREOF, AND PROCESSING APPARA...
- Publication number 20110210042
- Publication date Sep 1, 2011
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORAGE POD WITH REPLACEMENT FUNCTION OF CLEAN GAS
- Publication number 20110210041
- Publication date Sep 1, 2011
- TDK Corporation
- TSUTOMU OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER AND SUBSTRATE PROCE...
- Publication number 20100290888
- Publication date Nov 18, 2010
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER
- Publication number 20100212775
- Publication date Aug 26, 2010
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER
- Publication number 20100133270
- Publication date Jun 3, 2010
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED CONTAINER AND LID OPENING/CLOSING SYSTEM THEREFOR
- Publication number 20100117377
- Publication date May 13, 2010
- TDK Corporation
- Tsutomu OKABE
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Application
CLOSED CONTAINER AND LID OPENING/CLOSING SYSTEM THEREFOR
- Publication number 20100059408
- Publication date Mar 11, 2010
- TDK Corporation
- Hiroshi IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINED OBJECT TRANSFER SYSTEM
- Publication number 20090297298
- Publication date Dec 3, 2009
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR OPENING/CLOSING LID OF CLOSED CONTAINER, G...
- Publication number 20090245978
- Publication date Oct 1, 2009
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NTERFACE SEAL
- Publication number 20090218773
- Publication date Sep 3, 2009
- TDK Corporation
- Tsutomu Okabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
CONTAINED OBJECT TRANSFER SYSTEM
- Publication number 20090175709
- Publication date Jul 9, 2009
- TDK Corporation
- TSUTOMU OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER AND SUBSTRATE PROCE...
- Publication number 20090035099
- Publication date Feb 5, 2009
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING AN OBJECT IN A CONTAINER AND LID OPENING/CLOSI...
- Publication number 20090035100
- Publication date Feb 5, 2009
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE SEAL
- Publication number 20070210533
- Publication date Sep 13, 2007
- TDK Corporation
- Tsutomu Okabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER
- Publication number 20070151620
- Publication date Jul 5, 2007
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER
- Publication number 20070151619
- Publication date Jul 5, 2007
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE SYSTEM FOR A PRODUCT CONTAINER AND TABLE FOR USE IN THE PURGE...
- Publication number 20060288664
- Publication date Dec 28, 2006
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer detecting device
- Publication number 20060087661
- Publication date Apr 27, 2006
- TDK Corporation
- Toshihiko Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tsutomu OKABE

Person

Patents Grantslast 30 patents

Circulating EFEM

EFEM and method of introducing replacement gas thereinto

EFEM and method of introducing dry air thereinto

Circulating EFEM

Controlling method for a wafer transportation part and a load port...

Mini-environment apparatus

EFEM

Load port device and cleaning gas introducing method into a contain...

Load port apparatus and clamping device to be used for the same

Lid opening/closing system for closed container and substrate proce...

Substrate storage pod and lid member thereof, and processing appara...

Substrate storage pod and lid opening/closing system for the same

Lid opening/closing system for closed container

Closed container and lid opening/closing system therefor

Substrate storage pod with replacement function of clean gas

Lid opening/closing system of an airtight container

Lid opening/closing system of an airtight container

Closed container and lid opening/closing system therefor

Method of processing an object in a container and lid opening/closi...

Contained object transfer system

Apparatus and method for opening/closing lid of closed container, g...

Lid opening/closing system of an airtight container

Contained object transfer system

Gas replacement system

Lid opening/closing system of an airtight container

Lid opening/closing system for closed container and substrate proce...

Lid opening/closing system of an airtight container

Wafer processing apparatus having dust proof function

Pod clamping unit in pod opener, pod corresponding to pod clamping...

Wafer processing apparatus having dust proof function

Patents Applicationslast 30 patents

CIRCULATING EFEM

CIRCULATING EFEM

EFEM AND METHOD OF INTRODUCING DRY AIR THEREINTO

EFEM AND METHOD OF INTRODUCING REPLACEMENT GAS THEREINTO

CONTROLING METHOD FOR A WAFER TRANSPORTATION PART AND A LOAD PORT P...

LOAD PORT DEVICE AND CLEANING GAS INTRODUCING METHOD INTO A CONTAIN...

MINI-ENVIRONMENT APPARATUS

EFEM

LOAD PORT APPARATUS AND CLAMPING DEVICE TO BE USED FOR THE SAME

LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER

LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER

SUBSTRATE STORAGE POD AND LID OPENING/CLOSING SYSTEM FOR THE SAME

SUBSTRATE STORAGE POD AND LID MEMBER THEREOF, AND PROCESSING APPARA...

SUBSTRATE STORAGE POD WITH REPLACEMENT FUNCTION OF CLEAN GAS

LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER AND SUBSTRATE PROCE...

LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER

LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER

CLOSED CONTAINER AND LID OPENING/CLOSING SYSTEM THEREFOR

CLOSED CONTAINER AND LID OPENING/CLOSING SYSTEM THEREFOR

CONTAINED OBJECT TRANSFER SYSTEM

APPARATUS AND METHOD FOR OPENING/CLOSING LID OF CLOSED CONTAINER, G...

NTERFACE SEAL

CONTAINED OBJECT TRANSFER SYSTEM

LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER AND SUBSTRATE PROCE...

METHOD OF PROCESSING AN OBJECT IN A CONTAINER AND LID OPENING/CLOSI...

INTERFACE SEAL

LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER

LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER

PURGE SYSTEM FOR A PRODUCT CONTAINER AND TABLE FOR USE IN THE PURGE...

Wafer detecting device