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Tsutomu Oosaka
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Etching method
Patent number
7,105,447
Issue date
Sep 12, 2006
Sony Corporation
Tsutomu Oosaka
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Etching method
Publication number
20050106892
Publication date
May 19, 2005
SONY CORPORATION
Tsutomu Oosaka
B81 - MICRO-STRUCTURAL TECHNOLOGY