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Tsutomu Satoyoshi
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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Inductive coupling plasma processing apparatus
Patent number
6,387,208
Issue date
May 14, 2002
Tokyo Electron Limited
Tsutomu Satoyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inductively-coupled-plasma-processing apparatus
Patent number
6,331,754
Issue date
Dec 18, 2001
Tokyo Electron Limited
Tsutomu Satoyoshi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Inductively-Coupled Plasma Processing Apparatus
Publication number
20200227236
Publication date
Jul 16, 2020
TOKYO ELECTRON LIMITED
Hitoshi SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and plasma processing method
Publication number
20050241769
Publication date
Nov 3, 2005
TOKYO ELECTRON LIMITED
Tsutomu Satoyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate supporting table, method for producing same, and processi...
Publication number
20050120962
Publication date
Jun 9, 2005
Joichi Ushioda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate supporting table,method for producing same, and processin...
Publication number
20020134511
Publication date
Sep 26, 2002
Joichi Ushioda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Inductive coupling plasma processing apparatus
Publication number
20020002947
Publication date
Jan 10, 2002
Tsutomu Satoyoshi
H01 - BASIC ELECTRIC ELEMENTS