Membership
Tour
Register
Log in
Tsutomu Shimayama
Follow
Person
Sagamihara-Shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Applications
last 30 patents
Information
Patent Application
Process kit design for deposition chamber
Publication number
20050150452
Publication date
Jul 14, 2005
Soovo Sen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...