Tsutomu Takenaka

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,400,434
- Issue date Jul 26, 2016
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,348,241
- Issue date May 24, 2016
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing device
- Patent number 8,665,416
- Issue date Mar 4, 2014
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,472,009
- Issue date Jun 25, 2013
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 7,791,707
- Issue date Sep 7, 2010
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle, semiconductor exposure apparatus and method, and semicondu...
- Patent number 7,348,107
- Issue date Mar 25, 2008
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICL...
- Publication number 20240345494
- Publication date Oct 17, 2024
- Canon Kabushiki Kaisha
- NAOKI FUNABASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20150092169
- Publication date Apr 2, 2015
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110058151
- Publication date Mar 10, 2011
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20090195764
- Publication date Aug 6, 2009
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090103067
- Publication date Apr 23, 2009
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20090066927
- Publication date Mar 12, 2009
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle, semiconductor exposure apparatus and method, and semicondu...
- Publication number 20050042525
- Publication date Feb 24, 2005
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tsutomu Takenaka

Person

Patents Grantslast 30 patents

Exposure apparatus, exposure method, and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus and method of manufacturing device

Exposure apparatus and device manufacturing method

Exposure apparatus, exposure method, and device manufacturing method

Reticle, semiconductor exposure apparatus and method, and semicondu...

Patents Applicationslast 30 patents

TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICL...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Reticle, semiconductor exposure apparatus and method, and semicondu...