Tsutomu Tawa

Follow

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for electron-beam lithography
- Patent number 7,342,241
- Issue date Mar 11, 2008
- Hitachi High-Technologies Corporation
- Yasuko Aoki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for electron-beam lithography
- Publication number 20060011080
- Publication date Jan 19, 2006
- Hitachi High-Technologies Corporation
- Yasuko Aoki
- B82 - NANO-TECHNOLOGY