Tsutomu Ueyama

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thin film forming apparatus and thin film forming method
- Patent number 7,017,637
- Issue date Mar 28, 2006
- Dainippon Screen Mfg. Co. Ltd.
- Tsutomu Ueyama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thin film forming apparatus and thin film forming method
- Patent number 6,926,057
- Issue date Aug 9, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thin film forming apparatus and thin film forming method
- Patent number 6,918,421
- Issue date Jul 19, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus and slit nozzle
- Patent number 6,911,088
- Issue date Jun 28, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki Kitazawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,893,805
- Issue date May 17, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Izuru Iseki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of heat treatment by light irradiation
- Patent number 6,859,616
- Issue date Feb 22, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Tatsufumi Kusuda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate spin treating apparatus
- Patent number 5,916,366
- Issue date Jun 29, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- B08 - CLEANING
Information Patent Grant
Subtrate processing apparatus and device for and method of exchangi...
- Patent number 5,571,325
- Issue date Nov 5, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for correcting snaking in a rollfilm feeding a...
- Patent number 4,847,634
- Issue date Jul 11, 1989
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Kawai
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method and device for loading and unloading a film on and out of a...
- Patent number 4,770,404
- Issue date Sep 13, 1988
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Linear actuator
- Patent number 4,757,223
- Issue date Jul 12, 1988
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Piezoelectric motor
- Patent number 4,743,792
- Issue date May 10, 1988
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Film end holding device
- Patent number 4,707,123
- Issue date Nov 17, 1987
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device of switching a scanning beam diameter
- Patent number 4,642,701
- Issue date Feb 10, 1987
- Dainippon Screen Mfg. Co., Ltd.
- Kiyoshi Maeda
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Thin film forming apparatus and thin film forming method
- Publication number 20060113021
- Publication date Jun 1, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- B32 - LAYERED PRODUCTS
Information Patent Application
Thin film forming apparatus and thin film forming method
- Publication number 20050230035
- Publication date Oct 20, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Thin film forming apparatus and thin film forming method
- Publication number 20050139313
- Publication date Jun 30, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- B32 - LAYERED PRODUCTS
Information Patent Application
Apparatus for and method of heat treatment by light irradiation
- Publication number 20040112890
- Publication date Jun 17, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Tatsufumi Kusuda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate processing apparatus and slit nozzle
- Publication number 20030183167
- Publication date Oct 2, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki Kitazawa
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Thin film forming apparatus and thin film forming method
- Publication number 20030079829
- Publication date May 1, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- B32 - LAYERED PRODUCTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20030064609
- Publication date Apr 3, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Izuru Iseki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thin film forming apparatus and thin film forming method
- Publication number 20030056890
- Publication date Mar 27, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thin film forming apparatus and thin film forming method
- Publication number 20030056725
- Publication date Mar 27, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- B32 - LAYERED PRODUCTS

Tsutomu Ueyama

Person

Patents Grantslast 30 patents

Thin film forming apparatus and thin film forming method

Thin film forming apparatus and thin film forming method

Thin film forming apparatus and thin film forming method

Substrate processing apparatus and slit nozzle

Substrate processing apparatus and substrate processing method

Apparatus for and method of heat treatment by light irradiation

Substrate spin treating apparatus

Subtrate processing apparatus and device for and method of exchangi...

Method and apparatus for correcting snaking in a rollfilm feeding a...

Method and device for loading and unloading a film on and out of a...

Linear actuator

Piezoelectric motor

Film end holding device

Device of switching a scanning beam diameter

Patents Applicationslast 30 patents

Thin film forming apparatus and thin film forming method

Thin film forming apparatus and thin film forming method

Thin film forming apparatus and thin film forming method

Apparatus for and method of heat treatment by light irradiation

Substrate processing apparatus and slit nozzle

Thin film forming apparatus and thin film forming method

Substrate processing apparatus and substrate processing method

Thin film forming apparatus and thin film forming method

Thin film forming apparatus and thin film forming method