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Tsutomu Wakamori
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Machida, JP
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Patents Grants
last 30 patents
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Patent Grant
Vertical heat treatment apparatus
Patent number
9,803,924
Issue date
Oct 31, 2017
Tokyo Electron Limited
Hiroshi Kikuchi
F27 - FURNACES KILNS OVENS RETORTS
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Patent Grant
Processing apparatus
Patent number
5,788,448
Issue date
Aug 4, 1998
Tokyo Electron Limited
Tsutomu Wakamori
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
VERTICAL HEAT TREATMENT APPARATUS
Publication number
20150253082
Publication date
Sep 10, 2015
TOKYO ELECTRON LIMITED
Hiroshi Kikuchi
F27 - FURNACES KILNS OVENS RETORTS