Tsutomu Wakamori

Person

  • Machida, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Vertical heat treatment apparatus

    • Patent number 9,803,924
    • Issue date Oct 31, 2017
    • Tokyo Electron Limited
    • Hiroshi Kikuchi
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Grant

    Processing apparatus

    • Patent number 5,788,448
    • Issue date Aug 4, 1998
    • Tokyo Electron Limited
    • Tsutomu Wakamori
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    VERTICAL HEAT TREATMENT APPARATUS

    • Publication number 20150253082
    • Publication date Sep 10, 2015
    • TOKYO ELECTRON LIMITED
    • Hiroshi Kikuchi
    • F27 - FURNACES KILNS OVENS RETORTS