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Tsuyoshi Fukada
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Aichi-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pressure sensor and method for manufacturing the same
Patent number
8,028,584
Issue date
Oct 4, 2011
Denso Corporation
Kiyoshi Otsuka
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor sensor having heater on insulation film and manufactu...
Patent number
8,006,553
Issue date
Aug 30, 2011
Denso Corporation
Ryuichirou Abe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor sensor
Patent number
7,298,022
Issue date
Nov 20, 2007
Denso Corporation
Tetsuo Fujii
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing movable portion of semiconductor device
Patent number
7,214,625
Issue date
May 8, 2007
Denso Corporation
Kazushi Asami
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing semiconductor device capable of sensing dyn...
Patent number
6,906,394
Issue date
Jun 14, 2005
Denso Corporation
Hiroshi Muto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device having a moveable member therein and a protect...
Patent number
6,787,866
Issue date
Sep 7, 2004
Denso Corporation
Tetsuo Fujii
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing semiconductor device capable of sensing dyn...
Patent number
6,753,201
Issue date
Jun 22, 2004
Denso Corporation
Hiroshi Muto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor dynamic quantity detecting sensor and manufacturing m...
Patent number
6,718,824
Issue date
Apr 13, 2004
Nippon Soken, Inc.
Takeshi Ito
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor sensor device and method of manufacturing the same
Patent number
6,444,543
Issue date
Sep 3, 2002
Denso Corporation
Minekazu Sakai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device produced by dicing
Patent number
6,429,506
Issue date
Aug 6, 2002
Denso Corporation
Tetsuo Fujii
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method for manufacturing semiconductor dynamic quantity sensor
Patent number
6,423,563
Issue date
Jul 23, 2002
Denso Corporation
Tsuyoshi Fukada
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Angular velocity sensor
Patent number
6,308,567
Issue date
Oct 30, 2001
Denso Corporation
Hirofumi Higuchi
G01 - MEASURING TESTING
Information
Patent Grant
Method for manufacturing semiconductor dynamic quantity sensor
Patent number
6,287,885
Issue date
Sep 11, 2001
Denso Corporation
Hiroshi Muto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of etching silicon wafer and silicon wafer
Patent number
6,284,670
Issue date
Sep 4, 2001
Denso Corporation
Yoshitsugu Abe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor physical quantity sensor and production method thereof
Patent number
6,240,782
Issue date
Jun 5, 2001
Denso Corporation
Nobuyuki Kato
G01 - MEASURING TESTING
Information
Patent Grant
Electrochemical etching method for silicon substrate having PN junc...
Patent number
6,194,236
Issue date
Feb 27, 2001
Denso Corporation
Minekazu Sakai
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor dynamical quantity sensor device having electrodes in...
Patent number
6,151,966
Issue date
Nov 28, 2000
Denso Corporation
Minekazu Sakai
G01 - MEASURING TESTING
Information
Patent Grant
Method for fabrication of a semiconductor sensor
Patent number
6,143,584
Issue date
Nov 7, 2000
Denso Corporation
Tsuyoshi Fukada
G01 - MEASURING TESTING
Information
Patent Grant
Method of producing an anodic bonded semiconductor sensor element
Patent number
6,077,721
Issue date
Jun 20, 2000
Nippondenso Co., Ltd.
Tsuyoshi Fukada
G01 - MEASURING TESTING
Information
Patent Grant
Etching method for silicon substrates and semiconductor sensor
Patent number
5,949,118
Issue date
Sep 7, 1999
Nippondenso Co., Ltd.
Minekazu Sakai
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor device and method for producing the same
Patent number
5,920,106
Issue date
Jul 6, 1999
Denso Corporation
Nobukazu Oba
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor element mount and producing method therefor
Patent number
5,736,061
Issue date
Apr 7, 1998
Nippondenso Co. Ltd.
Tsuyoshi Fukada
G01 - MEASURING TESTING
Information
Patent Grant
Method of etching semiconductor wafers
Patent number
5,677,248
Issue date
Oct 14, 1997
Nippondenso Co., Ltd.
Minekazu Sakai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for producing semiconductor strain-sensitive sensor
Patent number
5,654,244
Issue date
Aug 5, 1997
Nippondenso Co., Ltd.
Minekazu Sakai
G01 - MEASURING TESTING
Information
Patent Grant
Production method of a semiconductor dynamic sensor
Patent number
5,643,803
Issue date
Jul 1, 1997
Nippondenso Co., Ltd.
Tsuyoshi Fukada
G01 - MEASURING TESTING
Information
Patent Grant
Method of forming a semiconductor strain sensor
Patent number
5,622,901
Issue date
Apr 22, 1997
Nippondenso Co., Ltd.
Tsuyoshi Fukada
G01 - MEASURING TESTING
Information
Patent Grant
Plasma etching method and device manufacturing method thereby
Patent number
5,575,887
Issue date
Nov 19, 1996
Nippondenso Co., Ltd.
Takahiko Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing a semiconductor dynamic sensor
Patent number
5,549,785
Issue date
Aug 27, 1996
Nippondenso Co., Ltd.
Minekazu Sakai
G01 - MEASURING TESTING
Information
Patent Grant
Method for producing an acceleration sensor
Patent number
5,525,549
Issue date
Jun 11, 1996
Nippondenso Co., Ltd.
Tsuyoshi Fukada
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor strain sensor having improved resistance to bonding s...
Patent number
5,408,112
Issue date
Apr 18, 1995
Nippondenso Co., Ltd.
Akira Tai
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor sensor having heater on insulation film and manufactu...
Publication number
20100005877
Publication date
Jan 14, 2010
DENSO CORPORATION
Ryuichirou Abe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Pressure sensor and method for manufacturing the same
Publication number
20090049921
Publication date
Feb 26, 2009
DENSO CORPORATION
Kiyoshi Otsuka
G01 - MEASURING TESTING
Information
Patent Application
Semiconductor sensor
Publication number
20050156309
Publication date
Jul 21, 2005
Tetsuo Fujii
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Method for manufacturing movable portion of semiconductor device
Publication number
20050054153
Publication date
Mar 10, 2005
DENSO Corporation
Kazushi Asami
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of manufacturing semiconductor device capable of sensing dyn...
Publication number
20030201506
Publication date
Oct 30, 2003
Hiroshi Muto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of manufacturing semiconductor device capable of sensing dyn...
Publication number
20020177252
Publication date
Nov 28, 2002
Hiroshi Muto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor device and method for producing the same by dicing
Publication number
20020093076
Publication date
Jul 18, 2002
Tetsuo Fujii
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor dynamic quantity detecting sensor and manufacturing m...
Publication number
20020073779
Publication date
Jun 20, 2002
Takeshi Ito
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor sensor device and method of manufacturing the same
Publication number
20010055876
Publication date
Dec 27, 2001
Minekazu Sakai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for manufacturing semiconductor dynamic quantity sensor
Publication number
20010029060
Publication date
Oct 11, 2001
DENSO Corporation
Tsuyoshi Fukada
B81 - MICRO-STRUCTURAL TECHNOLOGY