Tsuyoshi Hashimoto

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Kofu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming a laminated structure to enhance metal silicide a...
- Patent number 6,489,208
- Issue date Dec 3, 2002
- Tokyo Electron Limited
- Masato Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminated structure and a method of forming the same
- Patent number 6,404,021
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Masato Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for forming laminated thin films or layers
- Patent number 6,251,188
- Issue date Jun 26, 2001
- Tokyo Electron Limited
- Tsuyoshi Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming laminated thin films or layers
- Patent number 6,022,586
- Issue date Feb 8, 2000
- Tokyo Electron Limited
- Tsuyoshi Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus
- Patent number 5,997,651
- Issue date Dec 7, 1999
- Tokyo Electron Limited
- Kimihiro Matsuse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND GAS INJECTION MEMBER
- Publication number 20110283942
- Publication date Nov 24, 2011
- TOKYO ELECTRON LIMITED
- Teruo IWATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film-formation method for semiconductor process
- Publication number 20050136657
- Publication date Jun 23, 2005
- TOKYO ELECTRON LIMITED
- Hiroaki Yokoi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laminated structure and a method of forming the same
- Publication number 20020058384
- Publication date May 16, 2002
- Masato Koizumi
- H01 - BASIC ELECTRIC ELEMENTS