Tsuyoshi HIDA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Workpiece placement apparatus and processing apparatus
- Patent number 11,942,357
- Issue date Mar 26, 2024
- Tokyo Electron Limited
- Yohei Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece placement apparatus and processing apparatus
- Patent number 11,410,871
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Yohei Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 10,020,172
- Issue date Jul 10, 2018
- Tokyo Electron Limited
- Mitsunori Ohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 9,076,636
- Issue date Jul 7, 2015
- Tokyo Electron Limited
- Mitsunori Ohata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and manufacturing method thereof
- Patent number 8,776,356
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Tsuyoshi Hida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic chuck and manufacturing method thereof
- Patent number 8,517,392
- Issue date Aug 27, 2013
- Tokyo Electron Limited
- Tsuyoshi Hida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
WORKPIECE PLACEMENT APPARATUS AND PROCESSING APPARATUS
- Publication number 20220336257
- Publication date Oct 20, 2022
- TOKYO ELECTRON LIMITED
- Yohei UCHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE PLACEMENT APPARATUS AND PROCESSING APPARATUS
- Publication number 20190279894
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Yohei UCHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20150255255
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Mitsunori Ohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE BACKFLOW PREVENTING PART AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150170891
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Masanori TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF
- Publication number 20130306593
- Publication date Nov 21, 2013
- TOKYO ELECTRON LIMITED
- Tsuyoshi HIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE UNIT, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CON...
- Publication number 20120273135
- Publication date Nov 1, 2012
- TOKYO ELECTRON LIMITED
- Tsuyoshi Hida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20120061351
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Mitsunori Ohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF
- Publication number 20090243236
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Tsuyoshi HIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE UNIT, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CON...
- Publication number 20090223932
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Tsuyoshi Hida
- H01 - BASIC ELECTRIC ELEMENTS

Tsuyoshi HIDA

Person

Patents Grantslast 30 patents

Workpiece placement apparatus and processing apparatus

Workpiece placement apparatus and processing apparatus

Plasma processing apparatus, plasma processing method and storage m...

Plasma processing apparatus, plasma processing method and storage m...

Electrostatic chuck and manufacturing method thereof

Electrostatic chuck and manufacturing method thereof

Patents Applicationslast 30 patents

WORKPIECE PLACEMENT APPARATUS AND PROCESSING APPARATUS

WORKPIECE PLACEMENT APPARATUS AND PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...

PARTICLE BACKFLOW PREVENTING PART AND SUBSTRATE PROCESSING APPARATUS

ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF

ELECTRODE UNIT, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CON...

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...

ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF

ELECTRODE UNIT, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CON...