Tsuyoshi Kagami

Person

  • Shizuoka, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    OBJECT PROCESSING APPARATUS

    • Publication number 20210305070
    • Publication date Sep 30, 2021
    • ULVAC, Inc.
    • Tsuyoshi KAGAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20200243310
    • Publication date Jul 30, 2020
    • ULVAC, Inc.
    • Tsuyoshi KAGAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PURGE GAS ASSEMBLY

    • Publication number 20100139556
    • Publication date Jun 10, 2010
    • Tsuyoshi Kagami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN FILM PRODUCTION APPARATUS AND INNER BLOCK FOR THIN FILM PRODUC...

    • Publication number 20090159006
    • Publication date Jun 25, 2009
    • Ulvac, Inc.
    • Takakazu Yamada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...