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Tsuyoshi Kubota
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Patents Grants
last 30 patents
Information
Patent Grant
Method of evaluating semiconductor substrate and method of manufact...
Patent number
10,641,708
Issue date
May 5, 2020
Sumco Corporation
Kazutaka Eriguchi
G01 - MEASURING TESTING
Information
Patent Grant
Method of evaluating metal contamination in boron-doped P-type sili...
Patent number
9,935,020
Issue date
Apr 3, 2018
Sumco Corporation
Shinya Fukushima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of evaluating metal contamination in boron-doped P-type sili...
Patent number
9,905,481
Issue date
Feb 27, 2018
Sumco Corporation
Shinya Fukushima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of evaluating metal contamination in semiconductor wafer and...
Patent number
9,842,779
Issue date
Dec 12, 2017
Sumco Corporation
Kei Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring minority carrier diffusion length and method of...
Patent number
7,727,783
Issue date
Jun 1, 2010
Sumco Corporation
Tsuyoshi Kubota
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF EVALUATING SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACT...
Publication number
20180038797
Publication date
Feb 8, 2018
SUMCO CORPORATION
Kazutaka ERIGUCHI
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF EVALUATING METAL CONTAMINATION IN BORON-DOPED P-TYPE SILI...
Publication number
20160079129
Publication date
Mar 17, 2016
SUMCO CORPORATION
Shinya FUKUSHIMA
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF EVALUATING METAL CONTAMINATION IN SEMICONDUCTOR WAFER AND...
Publication number
20150318222
Publication date
Nov 5, 2015
SUMCO CORPORATION
Kei MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MEASURING MINORITY CARRIER DIFFUSION LENGTH AND METHOD OF...
Publication number
20070287205
Publication date
Dec 13, 2007
SUMCO CORPORATION
Tsuyoshi Kubota
G01 - MEASURING TESTING