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Tsuyoshi MATSUMOTO

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  • Kudamatsu-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method and apparatus
    • Patent number 9,230,782
    • Issue date Jan 5, 2016
    • Hitachi High-Technologies Corporation
    • Eiji Ikegami
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Plasma processing method and apparatus
    • Patent number 8,900,401
    • Issue date Dec 2, 2014
    • Hitachi High-Technologies Corporation
    • Eiji Ikegami
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing method
    • Patent number 8,801,951
    • Issue date Aug 12, 2014
    • Hitachi High-Technologies Corporation
    • Yoshiharu Inoue
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for plasma processing
    • Patent number 8,632,637
    • Issue date Jan 21, 2014
    • Hitachi High-Technologies Corporation
    • Ryoji Nishio
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Method and apparatus for plasma processing
    • Patent number 8,366,870
    • Issue date Feb 5, 2013
    • Hitachi High-Technologies Corporation
    • Ryoji Nishio
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 8,083,888
    • Issue date Dec 27, 2011
    • Hitachi High-Technologies Corporation
    • Tatehito Usui
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Method and apparatus for plasma processing
    • Patent number 8,057,634
    • Issue date Nov 15, 2011
    • Hitachi High-Technologies Corporation
    • Ryoji Nishio
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Plasma processing method and apparatus
    • Patent number 8,038,896
    • Issue date Oct 18, 2011
    • Hitachi High-Technologies Corporation
    • Eiji Ikegami
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents